Characterization of stiction effects of an electrostatic micro positioner for probe storage

M. Patrascu, Stefano Stramigioli

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    53 Downloads (Pure)

    Fingerprint Dive into the research topics of 'Characterization of stiction effects of an electrostatic micro positioner for probe storage'. Together they form a unique fingerprint.