Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction

I. Barsony, J.G.E. Klappe, T.W. Ryan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings Symposium Materials Research Society, Vol. 239
    Place of PublicationBoston
    Pages177-182
    Number of pages0
    Publication statusPublished - 2 Dec 1992

    Keywords

    • METIS-114009

    Cite this

    Barsony, I., Klappe, J. G. E., & Ryan, T. W. (1992). Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction. In Proceedings Symposium Materials Research Society, Vol. 239 (pp. 177-182). Boston.
    Barsony, I. ; Klappe, J.G.E. ; Ryan, T.W. / Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction. Proceedings Symposium Materials Research Society, Vol. 239. Boston, 1992. pp. 177-182
    @inproceedings{4f0188afbb204e42b3e1c6d977110b88,
    title = "Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction",
    keywords = "METIS-114009",
    author = "I. Barsony and J.G.E. Klappe and T.W. Ryan",
    year = "1992",
    month = "12",
    day = "2",
    language = "Undefined",
    pages = "177--182",
    booktitle = "Proceedings Symposium Materials Research Society, Vol. 239",

    }

    Barsony, I, Klappe, JGE & Ryan, TW 1992, Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction. in Proceedings Symposium Materials Research Society, Vol. 239. Boston, pp. 177-182.

    Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction. / Barsony, I.; Klappe, J.G.E.; Ryan, T.W.

    Proceedings Symposium Materials Research Society, Vol. 239. Boston, 1992. p. 177-182.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction

    AU - Barsony, I.

    AU - Klappe, J.G.E.

    AU - Ryan, T.W.

    PY - 1992/12/2

    Y1 - 1992/12/2

    KW - METIS-114009

    M3 - Conference contribution

    SP - 177

    EP - 182

    BT - Proceedings Symposium Materials Research Society, Vol. 239

    CY - Boston

    ER -

    Barsony I, Klappe JGE, Ryan TW. Characterization of stress and texture in RTCVD poly-Si layers by X-ray diffraction. In Proceedings Symposium Materials Research Society, Vol. 239. Boston. 1992. p. 177-182