Characterization of thin alumina films prepared by metal-organic chemical vopour deposition (MOCVD) by high resolution SEM

W.F. Lisowski, A.H.J. van den Berg, M.A. Smithers, V.A.C. Haanappel

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 21 Nov 1994
EventCMO Conference 1994 - Lunteren, Netherlands
Duration: 21 Nov 199421 Nov 1994

Conference

ConferenceCMO Conference 1994
CountryNetherlands
CityLunteren
Period21/11/9421/11/94

Keywords

  • METIS-133157

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