Characterization of thin alumina films prepared by metal-organic chemical vopour deposition (MOCVD) by high resolution SEM

W.F. Lisowski, A.H.J. van den Berg, M.A. Smithers, V.A.C. Haanappel

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 Nov 1994
Event	CMO Conference 1994 - Lunteren, Netherlands Duration: 21 Nov 1994 → 21 Nov 1994

Keywords

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title = "Characterization of thin alumina films prepared by metal-organic chemical vopour deposition (MOCVD) by high resolution SEM",

keywords = "METIS-133157",

author = "W.F. Lisowski and {van den Berg}, A.H.J. and M.A. Smithers and V.A.C. Haanappel",

year = "1994",

month = nov,

day = "21",

language = "Undefined",

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note = "CMO Conference 1994 ; Conference date: 21-11-1994 Through 21-11-1994",

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TY - CONF

T1 - Characterization of thin alumina films prepared by metal-organic chemical vopour deposition (MOCVD) by high resolution SEM

AU - Lisowski, W.F.

AU - van den Berg, A.H.J.

AU - Smithers, M.A.

AU - Haanappel, V.A.C.

PY - 1994/11/21

Y1 - 1994/11/21

KW - METIS-133157

M3 - Poster

SP - -

T2 - CMO Conference 1994

Y2 - 21 November 1994 through 21 November 1994

ER -