Characterization of thin alumina films prepared by metal-organic chemical vapour deposition (MOCVD) by high resolution SEM

W.F. Lisowski, A.H.J. van den Berg, M.A. Smithers, V.A.C. Haanappel

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 5 Sept 1994
Event	8. Arbeitstagung Angewandte Oberflaechenanalytik (AOFA 8) - Kaiserslautern, Duitsland Duration: 5 Sept 1994 → …

Conference	8. Arbeitstagung Angewandte Oberflaechenanalytik (AOFA 8)
City	Kaiserslautern, Duitsland
Period	5/09/94 → …

Keywords

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title = "Characterization of thin alumina films prepared by metal-organic chemical vapour deposition (MOCVD) by high resolution SEM",

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author = "W.F. Lisowski and {van den Berg}, A.H.J. and M.A. Smithers and V.A.C. Haanappel",

year = "1994",

month = sep,

day = "5",

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note = "8. Arbeitstagung Angewandte Oberflaechenanalytik (AOFA 8) ; Conference date: 05-09-1994",

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Characterization of thin alumina films prepared by metal-organic chemical vapour deposition (MOCVD) by high resolution SEM. / Lisowski, W.F.; van den Berg, A.H.J.; Smithers, M.A. et al.
1994. - Poster session presented at 8. Arbeitstagung Angewandte Oberflaechenanalytik (AOFA 8), Kaiserslautern, Duitsland.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Characterization of thin alumina films prepared by metal-organic chemical vapour deposition (MOCVD) by high resolution SEM

AU - Lisowski, W.F.

AU - van den Berg, A.H.J.

AU - Smithers, M.A.

AU - Haanappel, V.A.C.

PY - 1994/9/5

Y1 - 1994/9/5

KW - METIS-133156

M3 - Poster

SP - -

T2 - 8. Arbeitstagung Angewandte Oberflaechenanalytik (AOFA 8)

Y2 - 5 September 1994

ER -