Characterization of titanium hydride films covered by nanoscale evaporated Au layers: ToF-SIMS, XPS and AES depth profile analysis

W.F. Lisowski, A.H.J. van den Berg, D. Leonard, H.J. Mathieu

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Thin titanium hydride (TiHy) films, covered by ultrathin gold layers, have been compared with the corresponding titanium films after analysis using a combination of time-of-flight SIMS (ToF-SIMS), XPS and AES. The TiHy layers were prepared under UHV conditions by precisely controlled hydrogen sorption at 298 K on Ti film evaporated onto a glass substrate. Both Ti and TiHy films were then covered in situ by a nanoscale Au layer. Analyses were performed in separate systems after long-term exposure of the films to air. The thin gold layers covering the Ti and TiHy surfaces prevent any extensive air interaction with both films, allowing characterization of the bulk Ti and TiHy layers ex situ, even after a long-term application in air. The chemical nature of the TiHy layers has been analysed after sputtering of the Au top layer. The high-mass-resolution positive-ion ToF-SIMS spectra disclosed only one peak at mass 49 (49Ti+) for the Ti and two peaks at mass 49 (49Ti+ and 48TiH+) for the TiHy film, reflecting a difference in hydrogen concentration. Analysis of the features of the Ti Auger spectra during the sputter profile measurements allows the TiHy to be distinguished and characterized in the bulk region of the Au/TiHy layer. Besides TiHy, TiO and TiOH were detected by XPS to be the main chemical compounds in the interface region of the Au/TiHy film.
Original languageUndefined
Pages (from-to)292-297
Number of pages6
JournalSurface and interface analysis
Issue number4
Publication statusPublished - 2000


  • Titanium
  • ToF-SIMS
  • titanium hydride
  • METIS-129094
  • AES depth profiles
  • Gold
  • XPS
  • IR-71617

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