Charge trapping in capacitive MEMS structure

M.C. van Essen, R. Cuperus, Herbert Wormeester, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 23 Sep 2008
EventMESA+ Day 2008 - Enschede, Netherlands
Duration: 23 Sep 200823 Sep 2008

Conference

ConferenceMESA+ Day 2008
CountryNetherlands
CityEnschede
Period23/09/0823/09/08
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-254592

Cite this

van Essen, M. C., Cuperus, R., Wormeester, H., Rogalla, H., & Flokstra, J. (2008). Charge trapping in capacitive MEMS structure. -. Poster session presented at MESA+ Day 2008, Enschede, Netherlands.
van Essen, M.C. ; Cuperus, R. ; Wormeester, Herbert ; Rogalla, Horst ; Flokstra, Jakob. / Charge trapping in capacitive MEMS structure. Poster session presented at MESA+ Day 2008, Enschede, Netherlands.
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year = "2008",
month = "9",
day = "23",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 23-09-2008 Through 23-09-2008",

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van Essen, MC, Cuperus, R, Wormeester, H, Rogalla, H & Flokstra, J 2008, 'Charge trapping in capacitive MEMS structure' MESA+ Day 2008, Enschede, Netherlands, 23/09/08 - 23/09/08, pp. -.

Charge trapping in capacitive MEMS structure. / van Essen, M.C.; Cuperus, R.; Wormeester, Herbert; Rogalla, Horst; Flokstra, Jakob.

2008. - Poster session presented at MESA+ Day 2008, Enschede, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Charge trapping in capacitive MEMS structure

AU - van Essen, M.C.

AU - Cuperus, R.

AU - Wormeester, Herbert

AU - Rogalla, Horst

AU - Flokstra, Jakob

PY - 2008/9/23

Y1 - 2008/9/23

KW - METIS-254592

M3 - Poster

SP - -

ER -

van Essen MC, Cuperus R, Wormeester H, Rogalla H, Flokstra J. Charge trapping in capacitive MEMS structure. 2008. Poster session presented at MESA+ Day 2008, Enschede, Netherlands.