Charge trapping in capacitive MEMS structure

M.C. van Essen, R. Cuperus, Herbert Wormeester, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 23 Sep 2008
EventMESA+ Day 2008 - Enschede, Netherlands
Duration: 23 Sep 200823 Sep 2008

Conference

ConferenceMESA+ Day 2008
CountryNetherlands
CityEnschede
Period23/09/0823/09/08
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-254592

Cite this

van Essen, M. C., Cuperus, R., Wormeester, H., Rogalla, H., & Flokstra, J. (2008). Charge trapping in capacitive MEMS structure. -. Poster session presented at MESA+ Day 2008, Enschede, Netherlands.