Charge trapping in capacitive MEMS structure

M.C. van Essen, R. Cuperus, Herbert Wormeester, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 23 Sep 2008
EventMESA+ Day 2008 - Enschede, Netherlands
Duration: 23 Sep 200823 Sep 2008

Conference

ConferenceMESA+ Day 2008
CountryNetherlands
CityEnschede
Period23/09/0823/09/08
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-254592

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