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Charge trapping in capacitive MEMS structure

  • M.C. van Essen
  • , R. Cuperus
  • , H. Wormeester
  • , H. Rogalla
  • , J. Flokstra

Research output: Contribution to conference › Poster › Other research output

Original languageEnglish
Number of pages1
Publication statusPublished - 23 Sept 2008
EventMESA+ Day 2008 - Enschede, Netherlands
Duration: 23 Sept 2008 → 23 Sept 2008

Conference

ConferenceMESA+ Day 2008
Country/TerritoryNetherlands
CityEnschede
Period23/09/08 → 23/09/08
Other(MESA+ Meeting/Dag)

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