Charge trapping in cryogenically stable capacitive MEMS devices

M.C. van Essen, L.J. Fernandez, J.A. Galan, Remco J. Wiegerink, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conference › Paper

Original language	Undefined
Pages	185-191
Number of pages	6
Publication status	Published - 21 Jun 2006
Event	7th International Workshop on Low Temperature Electronics, WOLTE 2006 - Noordwijk, Netherlands Duration: 21 Jun 2006 → 23 Jun 2006 Conference number: 7

Workshop	7th International Workshop on Low Temperature Electronics, WOLTE 2006
Abbreviated title	WOLTE-7
Country/Territory	Netherlands
City	Noordwijk
Period	21/06/06 → 23/06/06

Keywords

@conference{365945095a114721a2b299b82d9cd8ba,

title = "Charge trapping in cryogenically stable capacitive MEMS devices",

keywords = "METIS-235744",

author = "{van Essen}, M.C. and L.J. Fernandez and J.A. Galan and Wiegerink, {Remco J.} and Horst Rogalla and Jakob Flokstra",

year = "2006",

month = jun,

day = "21",

language = "Undefined",

pages = "185--191",

note = "7th International Workshop on Low Temperature Electronics, WOLTE 2006 ; Conference date: 21-06-2006 Through 23-06-2006",

}

TY - CONF

T1 - Charge trapping in cryogenically stable capacitive MEMS devices

AU - van Essen, M.C.

AU - Fernandez, L.J.

AU - Galan, J.A.

AU - Wiegerink, Remco J.

AU - Rogalla, Horst

AU - Flokstra, Jakob

N1 - Conference code: 7

PY - 2006/6/21

Y1 - 2006/6/21

KW - METIS-235744

M3 - Paper

SP - 185

EP - 191

T2 - 7th International Workshop on Low Temperature Electronics, WOLTE 2006

Y2 - 21 June 2006 through 23 June 2006

ER -