Charge trapping in cryogenically stable capacitive MEMS devices

M.C. van Essen, L.J. Fernandez, J.A. Galan, Remco J. Wiegerink, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePaper

    Original languageUndefined
    Pages185-191
    Number of pages6
    Publication statusPublished - 21 Jun 2006
    Event7th International Workshop on Low Temperature Electronics, WOLTE 2006 - Noordwijk, Netherlands
    Duration: 21 Jun 200623 Jun 2006
    Conference number: 7

    Workshop

    Workshop7th International Workshop on Low Temperature Electronics, WOLTE 2006
    Abbreviated titleWOLTE-7
    CountryNetherlands
    CityNoordwijk
    Period21/06/0623/06/06

    Keywords

    • METIS-235744

    Cite this

    van Essen, M. C., Fernandez, L. J., Galan, J. A., Wiegerink, R. J., Rogalla, H., & Flokstra, J. (2006). Charge trapping in cryogenically stable capacitive MEMS devices. 185-191. Paper presented at 7th International Workshop on Low Temperature Electronics, WOLTE 2006, Noordwijk, Netherlands.