TY - GEN
T1 - Charging induced damage on complex-antenna test structures
AU - Wang, Zhichun
AU - Ackaert, Jan
AU - Salm, Cora
AU - Kuper, F.G.
PY - 2001
Y1 - 2001
N2 - In this paper, new complex-antenna charging test structures are designed with antennas connected to the gate, source and drain of MOS transistors, and antennas connected to both plates of the metal-insulator-metalcapacitor (MIMC) devices. The measurement results show that the transistor is free of charging when the antennas on the gate, source and drain have the same area. The failure fraction increases with the increasing of the differences in antenna size. A simple logarithm function describes very well the relation between the failure fraction of the MIMC and the ratio of the two antenna areas exposed to charging.
Therefore, this logarithm function can be used to anticipate charging induced damage in MIMC devices with long interconnects.
AB - In this paper, new complex-antenna charging test structures are designed with antennas connected to the gate, source and drain of MOS transistors, and antennas connected to both plates of the metal-insulator-metalcapacitor (MIMC) devices. The measurement results show that the transistor is free of charging when the antennas on the gate, source and drain have the same area. The failure fraction increases with the increasing of the differences in antenna size. A simple logarithm function describes very well the relation between the failure fraction of the MIMC and the ratio of the two antenna areas exposed to charging.
Therefore, this logarithm function can be used to anticipate charging induced damage in MIMC devices with long interconnects.
KW - METIS-200759
KW - EWI-15639
KW - charging-induced damage (CID)
KW - metaloxide-semiconductor (MOS)
KW - metal-insulator-metalcapacitor(MIMC)
KW - antenna structure
KW - IR-67786
M3 - Conference contribution
SN - 90-73461-29-4
SP - 220
EP - 223
BT - Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001
PB - STW
CY - Utrecht, The Netherlands
Y2 - 28 November 2001 through 30 November 2001
ER -