Chemical Mechanical Polishing for Integrated Circuits

H. van Kranenburg, S.T.J.A. Vermeulen, P.H. Woerlee, E. Ruiter

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 16 Nov 1994
    EventFOM Werkgemeenschap Halfgeleiders 1994 - Veldhoven, Netherlands
    Duration: 16 Nov 199417 Nov 1994

    Conference

    ConferenceFOM Werkgemeenschap Halfgeleiders 1994
    CountryNetherlands
    CityVeldhoven
    Period16/11/9417/11/94

    Cite this

    van Kranenburg, H., Vermeulen, S. T. J. A., Woerlee, P. H., & Ruiter, E. (1994). Chemical Mechanical Polishing for Integrated Circuits. Poster session presented at FOM Werkgemeenschap Halfgeleiders 1994, Veldhoven, Netherlands.