Chemical Mechanical Polishing for Integrated Circuits

H. van Kranenburg, S.T.J.A. Vermeulen, P.H. Woerlee, E. Ruiter

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 16 Nov 1994
Event	FOM Werkgemeenschap Halfgeleiders 1994 - Veldhoven, Netherlands Duration: 16 Nov 1994 → 17 Nov 1994

Conference	FOM Werkgemeenschap Halfgeleiders 1994
Country/Territory	Netherlands
City	Veldhoven
Period	16/11/94 → 17/11/94

Cite this

@conference{0be75add70354b0996991744ce5ed486,

title = "Chemical Mechanical Polishing for Integrated Circuits",

author = "{van Kranenburg}, H. and S.T.J.A. Vermeulen and P.H. Woerlee and E. Ruiter",

year = "1994",

month = nov,

day = "16",

language = "English",

note = "FOM Werkgemeenschap Halfgeleiders 1994 ; Conference date: 16-11-1994 Through 17-11-1994",

}