| Original language | English |
|---|---|
| Title of host publication | STW Halfjaarverslag (14-10-1998) |
| Publisher | STW |
| Number of pages | 2 |
| Publication status | Published - 14 Oct 1998 |
Chemical Mechanical Polishing for Integrated Circuits
V. Nguyen Hoang, H. van Kranenburg, P.H. Woerlee
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Professional