Chemical mechanical polishing LPCVD silicon rich nitride

C. Gui, Stefan Sanchez, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationHonolulu, Hawai
    Publication statusPublished - 21 Oct 1999

    Keywords

    • METIS-114679

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