Chemical Mechanical Polishing of Copper

V. Nguyen Hoang

    Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

    Original languageUndefined
    Supervisors/Advisors
    • Woerlee, P.H., Supervisor
    • van Kranenburg, H., Advisor
    Award date20 Sep 2001
    Place of PublicationEnschede, the Netherlands
    Print ISBNs90-365-1659-5
    Publication statusPublished - 20 Sep 2001

    Keywords

    • METIS-200276

    Cite this

    Nguyen Hoang, V. (2001). Chemical Mechanical Polishing of Copper. Enschede, the Netherlands.
    Nguyen Hoang, V.. / Chemical Mechanical Polishing of Copper. Enschede, the Netherlands, 2001. 114 p.
    @phdthesis{68b0eec03e5a40b1b908008b39de2e74,
    title = "Chemical Mechanical Polishing of Copper",
    keywords = "METIS-200276",
    author = "{Nguyen Hoang}, V.",
    year = "2001",
    month = "9",
    day = "20",
    language = "Undefined",
    isbn = "90-365-1659-5",

    }

    Nguyen Hoang, V 2001, 'Chemical Mechanical Polishing of Copper', Enschede, the Netherlands.

    Chemical Mechanical Polishing of Copper. / Nguyen Hoang, V.

    Enschede, the Netherlands, 2001. 114 p.

    Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

    TY - THES

    T1 - Chemical Mechanical Polishing of Copper

    AU - Nguyen Hoang, V.

    PY - 2001/9/20

    Y1 - 2001/9/20

    KW - METIS-200276

    M3 - PhD Thesis - Research UT, graduation UT

    SN - 90-365-1659-5

    CY - Enschede, the Netherlands

    ER -

    Nguyen Hoang V. Chemical Mechanical Polishing of Copper. Enschede, the Netherlands, 2001. 114 p.