Chemical Mechanical Polishing of Copper

V. Nguyen Hoang

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Supervisors/Advisors
    • Woerlee, P.H., Supervisor
    • van Kranenburg, H., Advisor
    Award date20 Sep 2001
    Place of PublicationEnschede, the Netherlands
    Print ISBNs90-365-1659-5
    Publication statusPublished - 20 Sep 2001

    Keywords

    • METIS-200276

    Cite this

    Nguyen Hoang, V. (2001). Chemical Mechanical Polishing of Copper. Enschede, the Netherlands.