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Chemical Mechanical Polishing of Copper

  • V. Nguyen Hoang

    Research output: Thesis › PhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Supervisors/Advisors
    • Woerlee, P.H., Supervisor
    • van Kranenburg, H., Advisor
    Award date20 Sept 2001
    Place of PublicationEnschede, the Netherlands
    Print ISBNs90-365-1659-5
    Publication statusPublished - 20 Sept 2001

    Keywords

    • METIS-200276

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