Chemical mechanical polishing of integrated circuits

H. van Kranenburg, S.T.J.A. Vermeulen, P.H. Woerlee, E. Ruiter

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114928

    Cite this

    van Kranenburg, H., Vermeulen, S. T. J. A., Woerlee, P. H., & Ruiter, E. (1995, Jun 14). Chemical mechanical polishing of integrated circuits. Best Western Dish Hotel, Enschede.
    van Kranenburg, H. ; Vermeulen, S.T.J.A. ; Woerlee, P.H. ; Ruiter, E. / Chemical mechanical polishing of integrated circuits. 1995. Best Western Dish Hotel, Enschede.
    @misc{c207e185a18c4103abed5498b159c9f2,
    title = "Chemical mechanical polishing of integrated circuits",
    keywords = "METIS-114928",
    author = "{van Kranenburg}, H. and S.T.J.A. Vermeulen and P.H. Woerlee and E. Ruiter",
    year = "1995",
    month = "6",
    day = "14",
    language = "Undefined",
    type = "Other",

    }

    van Kranenburg, H, Vermeulen, STJA, Woerlee, PH & Ruiter, E 1995, Chemical mechanical polishing of integrated circuits. Best Western Dish Hotel, Enschede.

    Chemical mechanical polishing of integrated circuits. / van Kranenburg, H.; Vermeulen, S.T.J.A.; Woerlee, P.H.; Ruiter, E.

    Best Western Dish Hotel, Enschede. 1995, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Chemical mechanical polishing of integrated circuits

    AU - van Kranenburg, H.

    AU - Vermeulen, S.T.J.A.

    AU - Woerlee, P.H.

    AU - Ruiter, E.

    PY - 1995/6/14

    Y1 - 1995/6/14

    KW - METIS-114928

    M3 - Other contribution

    CY - Best Western Dish Hotel, Enschede

    ER -

    van Kranenburg H, Vermeulen STJA, Woerlee PH, Ruiter E. Chemical mechanical polishing of integrated circuits. 1995.