Chemical mechanical polishing of integrated circuits

H. van Kranenburg, S.T.J.A. Vermeulen, P.H. Woerlee, E. Ruiter

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114928

    Cite this

    van Kranenburg, H., Vermeulen, S. T. J. A., Woerlee, P. H., & Ruiter, E. (1995, Jun 14). Chemical mechanical polishing of integrated circuits. Best Western Dish Hotel, Enschede.