Chemical Mechanical Polishing of Metal

V. Nguyen Hoang, H. van Kranenburg, P.H. Woerlee

    Research output: Book/ReportReportProfessional

    Original languageUndefined
    Place of PublicationUniversity of Twente, Enschede, the Netherlands
    PublisherGeen opgaven
    Number of pages77
    Publication statusPublished - 1998

    Keywords

    • METIS-112598

    Cite this

    Nguyen Hoang, V., van Kranenburg, H., & Woerlee, P. H. (1998). Chemical Mechanical Polishing of Metal. University of Twente, Enschede, the Netherlands: Geen opgaven.