chemical mechanical polishing of metal layers

V. Nguyen Hoang (Inventor), A.J. Hof (Inventor), H. van Kranenburg (Inventor), P.H. Woerlee (Inventor)

Research output: Patent

Keywords

@misc{ad097f2fd44c46a3a09d63ebe145cbe8,

title = "chemical mechanical polishing of metal layers",

keywords = "METIS-118300",

author = "{Nguyen Hoang}, V. and A.J. Hof and {van Kranenburg}, H. and P.H. Woerlee",

note = "Aanvraag octrooi door UT-er ; 1e PHNL000730WEER/FV",

year = "2000",

month = dec,

day = "1",

language = "Undefined",

type = "Patent",

}