chemical mechanical polishing of metal layers

V. Nguyen Hoang (Inventor), A.J. Hof (Inventor), H. van Kranenburg (Inventor), P.H. Woerlee (Inventor)

Research output: Patent

Original languageUndefined
Patent number1e PHNL000730WEER/FV
Priority date1/12/00
Publication statusIn preparation - 1 Dec 2000

Keywords

  • METIS-118300

Cite this

Nguyen Hoang, V., Hof, A. J., van Kranenburg, H., & Woerlee, P. H. (2000). chemical mechanical polishing of metal layers. Manuscript in preparation. (Patent No. 1e PHNL000730WEER/FV).