Chemical physics of wet chemical etching of silicon

Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Micromachine
Place of Publication	Tokyo, Japan
Pages	1-28
Number of pages	29
Publication status	Published - 1 Nov 1993
Event	Micromachine - Duration: 1 Jan 1993 → 1 Jan 1993

Other	Micromachine
Period	1/01/93 → 1/01/93

Keywords

@inproceedings{7844557c91bd4ae488bc1b66d1f2055e,

title = "Chemical physics of wet chemical etching of silicon",

keywords = "METIS-114043, IR-17148",

author = "Elwenspoek, {Michael Curt}",

year = "1993",

month = nov,

day = "1",

language = "Undefined",

pages = "1--28",

booktitle = "Micromachine",

note = "Micromachine ; Conference date: 01-01-1993 Through 01-01-1993",

}