Chemical solution deposition techniques for epitaxial growth of complex oxides

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The chemical solution deposition (CSD) process is a wet-chemical process that is employed to fabricate a wide variety of amorphous and crystalline oxide thin films. This chapter describes the typical steps in a CSD process and their influence on the final microstructure and properties of films, and provides an overview of the different types of CSD processes. Some examples of CSD-derived oxide films are discussed
Original languageUndefined
Title of host publicationEpitaxial Growth of Complex Metal Oxides
EditorsG. Koster, Mark Huijben, G. Rijnders
Place of PublicationCambridge, UK
PublisherWoodhead Publishing
Number of pages486
ISBN (Print)978-1-78242-245-7
Publication statusPublished - 2015

Publication series

NameWoodhead Publishing Series in Electronic and Optical Materials
PublisherWoodhead Publishing


  • METIS-310906
  • IR-96673

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