Abstract
Using spectroscopic differential reflectometry (SDR), Auger electron spectroscopy (AES), and low-energy electron diffraction (LEED) we have studied the room temperature adsorption behavior of N2O and O2 at the clean low-Miller index Si surfaces
Original language | Undefined |
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Pages (from-to) | 2747-2754 |
Journal | Journal of vacuum science & technology A: vacuum, surfaces, and films |
Volume | 8 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1990 |
Keywords
- METIS-128483
- IR-23684