Chemical vapour deposition of Tungsten for the application in integrated circuits

A. Hasper

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Verweij, J.F., Supervisor
    • Wallinga, Hans, Supervisor
    Award date11 Jun 1992
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9005151-1
    Publication statusPublished - 11 Jun 1992

    Keywords

    • METIS-111431

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