Chemically anisotropic single-crystalline silicon nanotetrahedra

Johan W. Berenschot, Niels Roelof Tas, Henricus V. Jansen, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    15 Citations (Scopus)
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    Abstract

    We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.
    Original languageUndefined
    Article number10.1088/0957-4484/20/47/475302
    Pages (from-to)1-7
    Number of pages7
    JournalNanotechnology
    Volume20
    Issue number47
    DOIs
    Publication statusPublished - 26 Oct 2009

    Keywords

    • EWI-16403
    • METIS-264093
    • IR-68367
    • TST-Self Assembly

    Cite this

    Berenschot, Johan W. ; Tas, Niels Roelof ; Jansen, Henricus V. ; Elwenspoek, Michael Curt. / Chemically anisotropic single-crystalline silicon nanotetrahedra. In: Nanotechnology. 2009 ; Vol. 20, No. 47. pp. 1-7.
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    Berenschot, JW, Tas, NR, Jansen, HV & Elwenspoek, MC 2009, 'Chemically anisotropic single-crystalline silicon nanotetrahedra', Nanotechnology, vol. 20, no. 47, 10.1088/0957-4484/20/47/475302, pp. 1-7. https://doi.org/10.1088/0957-4484/20/47/475302

    Chemically anisotropic single-crystalline silicon nanotetrahedra. / Berenschot, Johan W.; Tas, Niels Roelof; Jansen, Henricus V.; Elwenspoek, Michael Curt.

    In: Nanotechnology, Vol. 20, No. 47, 10.1088/0957-4484/20/47/475302, 26.10.2009, p. 1-7.

    Research output: Contribution to journalArticleAcademicpeer-review

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    AU - Berenschot, Johan W.

    AU - Tas, Niels Roelof

    AU - Jansen, Henricus V.

    AU - Elwenspoek, Michael Curt

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    KW - METIS-264093

    KW - IR-68367

    KW - TST-Self Assembly

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