Chemically anisotropic single-crystalline silicon nanotetrahedra

Johan W. Berenschot; Niels Roelof Tas; Henricus V. Jansen; Michael Curt Elwenspoek

doi:10.1088/0957-4484/20/47/475302

Chemically anisotropic single-crystalline silicon nanotetrahedra

Johan W. Berenschot, Niels Roelof Tas, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.

Original language	Undefined
Article number	10.1088/0957-4484/20/47/475302
Pages (from-to)	1-7
Number of pages	7
Journal	Nanotechnology
Volume	20
Issue number	47
DOIs	https://doi.org/10.1088/0957-4484/20/47/475302
Publication status	Published - 26 Oct 2009

Keywords

EWI-16403
METIS-264093
IR-68367
TST-Self Assembly

Access to Document

10.1088/0957-4484/20/47/475302

http://eprints.eemcs.utwente.nl/secure2/16403/01/Chemically_anisotropic_single-crystalline_silicon_nanotetrahedra_-_Erwin.pdf

Cite this

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