Abstract
We describe a method based on silicon micromachining to machine single-crystalline silicon
nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the
fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the
possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The
chemical modification is anticipated to facilitate the self-assembly into new supermaterials such
as photonic crystals in the diamond lattice.
Original language | Undefined |
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Article number | 10.1088/0957-4484/20/47/475302 |
Pages (from-to) | 1-7 |
Number of pages | 7 |
Journal | Nanotechnology |
Volume | 20 |
Issue number | 47 |
DOIs | |
Publication status | Published - 26 Oct 2009 |
Keywords
- EWI-16403
- METIS-264093
- IR-68367
- TST-Self Assembly