Chemically anisotropic single-crystalline silicon nanotetrahedra

Johan W. Berenschot, Niels Roelof Tas, Henricus V. Jansen, Michael Curt Elwenspoek

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    We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.
    Original languageUndefined
    Article number10.1088/0957-4484/20/47/475302
    Pages (from-to)1-7
    Number of pages7
    Issue number47
    Publication statusPublished - 26 Oct 2009


    • EWI-16403
    • METIS-264093
    • IR-68367
    • TST-Self Assembly

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