Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

Gijsbertus J.M. Krijnen, A.A. Kuijpers, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 21 May 2002

    Keywords

    • METIS-206401

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