Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 21 May 2002

    Keywords

    • METIS-206401

    Cite this

    @conference{3c26382b453d40d89f61cbbd48c6475a,
    title = "Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation",
    keywords = "METIS-206401",
    author = "Krijnen, {Gijsbertus J.M.} and A.A. Kuijpers and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
    year = "2002",
    month = "5",
    day = "21",
    language = "Undefined",
    pages = "--",

    }

    TY - CONF

    T1 - Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

    AU - Krijnen, Gijsbertus J.M.

    AU - Kuijpers, A.A.

    AU - Wiegerink, Remco J.

    AU - Lammerink, Theodorus S.J.

    AU - Elwenspoek, Michael Curt

    PY - 2002/5/21

    Y1 - 2002/5/21

    KW - METIS-206401

    M3 - Poster

    SP - -

    ER -