Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

Gijsbertus J.M. Krijnen; A.A. Kuijpers; Remco J. Wiegerink; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

Gijsbertus J.M. Krijnen, A.A. Kuijpers, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 May 2002
Event	Posterpresentation European Workshop on Smart Structures in Engineering and Technology - Presqu'le de Giens, France Duration: 21 May 2002 → 23 May 2002

Conference

Conference	Posterpresentation European Workshop on Smart Structures in Engineering and Technology
City	Presqu'le de Giens, France
Period	21/05/02 → 23/05/02

Keywords

METIS-206401

Cite this

@conference{3c26382b453d40d89f61cbbd48c6475a,

title = "Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation",

keywords = "METIS-206401",

author = "Krijnen, \{Gijsbertus J.M.\} and A.A. Kuijpers and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "2002",

month = may,

day = "21",

language = "Undefined",

pages = "--",

note = "Posterpresentation European Workshop on Smart Structures in Engineering and Technology ; Conference date: 21-05-2002 Through 23-05-2002",

}

Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation. / Krijnen, Gijsbertus J.M.; Kuijpers, A.A.; Wiegerink, Remco J. et al.
2002. - Poster session presented at Posterpresentation European Workshop on Smart Structures in Engineering and Technology, Presqu'le de Giens, France.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

AU - Krijnen, Gijsbertus J.M.

AU - Kuijpers, A.A.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2002/5/21

Y1 - 2002/5/21

KW - METIS-206401

M3 - Poster

SP - -

T2 - Posterpresentation European Workshop on Smart Structures in Engineering and Technology

Y2 - 21 May 2002 through 23 May 2002

ER -