Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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1 Downloads (Pure)

Abstract

A comb-drive is a structure of interdigitated conductive fingers from which one part is able to move. Electrostatic forces allow the structure to function as an actuator whereas capacitance changes give way to use the structure as a sensor. Such structures became feasible on micrometer scale with the advent of surface micromachining in the late eighties. Since then there has been an overwhelming number of applications of comb-drives both in micro-actuation and sensing. This paper gives an overview of the basic operation of a comb-drive and its applications in sensing and actuation.
Original languageUndefined
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsBrian Culshaw
Place of PublicationBellingham, USA
PublisherSPIE - The International Society for Optical Engineering
Pages201-206
Number of pages6
ISBN (Print)0-8194-4529-0
DOIs
Publication statusPublished - 21 May 2002

Publication series

NameProceedings of SPIE
PublisherThe International Society for Optical Engineering
Volume4763
ISSN (Print)0277-786X

Keywords

  • METIS-215231
  • IR-62291
  • EWI-12698

Cite this

Krijnen, G. J. M., Kuijpers, A. A., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2002). Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In B. Culshaw (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 201-206). [10.1117/12.508735] (Proceedings of SPIE; Vol. 4763). Bellingham, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.508735
Krijnen, Gijsbertus J.M. ; Kuijpers, A.A. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. Proceedings of SPIE - The International Society for Optical Engineering. editor / Brian Culshaw. Bellingham, USA : SPIE - The International Society for Optical Engineering, 2002. pp. 201-206 (Proceedings of SPIE).
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abstract = "A comb-drive is a structure of interdigitated conductive fingers from which one part is able to move. Electrostatic forces allow the structure to function as an actuator whereas capacitance changes give way to use the structure as a sensor. Such structures became feasible on micrometer scale with the advent of surface micromachining in the late eighties. Since then there has been an overwhelming number of applications of comb-drives both in micro-actuation and sensing. This paper gives an overview of the basic operation of a comb-drive and its applications in sensing and actuation.",
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Krijnen, GJM, Kuijpers, AA, Lammerink, TSJ, Wiegerink, RJ & Elwenspoek, MC 2002, Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. in B Culshaw (ed.), Proceedings of SPIE - The International Society for Optical Engineering., 10.1117/12.508735, Proceedings of SPIE, vol. 4763, SPIE - The International Society for Optical Engineering, Bellingham, USA, pp. 201-206. https://doi.org/10.1117/12.508735

Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. / Krijnen, Gijsbertus J.M.; Kuijpers, A.A.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Brian Culshaw. Bellingham, USA : SPIE - The International Society for Optical Engineering, 2002. p. 201-206 10.1117/12.508735 (Proceedings of SPIE; Vol. 4763).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Krijnen GJM, Kuijpers AA, Lammerink TSJ, Wiegerink RJ, Elwenspoek MC. Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In Culshaw B, editor, Proceedings of SPIE - The International Society for Optical Engineering. Bellingham, USA: SPIE - The International Society for Optical Engineering. 2002. p. 201-206. 10.1117/12.508735. (Proceedings of SPIE). https://doi.org/10.1117/12.508735