Combined light/heat/gas sensor with decoupled electrical and thermal resistances

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    11 Downloads (Pure)

    Abstract

    This work extends our previously reported idea of maintaining a hot surface by means of dissipating power at a nano-scale conductive link (antifuse). Two approaches to the device design are considered: the hot surface can be either reduced to a sub-μm-size hotspot or maintained within a larger diameter of a few microns. The designs have an advantage of decoupling the electrical resistance and thermal resistance of the device. This paper contains the results of theoretical modelling and practical realization of the antifuse-based devices. The so-called pillar-shape antifuses have been practically realised and measured. The sensitivity to different sources of energy and thermo-electrical properties have been investigated. It appeared that a pillar-shape antifuse could perform as a combined nano-scale heat detector and light sensor. Furthermore, because of the ability to generate heat, we have studied the use of the pillar-shape antifuses for vapour sensing. First promising results showed a high response after introducing acetone (ethanol) vapour into the measuring chamber. No catalytic layer aiming at decreasing the operating temperature and increasing the sensitivity was deposited on the device surface.
    Original languageEnglish
    Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages635-648
    Number of pages14
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 29 Nov 2002
    EventSESENS 2002 - Veldhoven, Netherlands
    Duration: 29 Nov 200230 Nov 2002

    Workshop

    WorkshopSESENS 2002
    CountryNetherlands
    CityVeldhoven
    Period29/11/0230/11/02

    Fingerprint

    thermal resistance
    electrical resistance
    hot surfaces
    heat
    sensors
    gases
    vapors
    sensitivity
    operating temperature
    decoupling
    acetone
    ethyl alcohol
    chambers
    electrical properties
    detectors
    energy

    Keywords

    • Gas sensor
    • nano-hotspot
    • heat sensor
    • EWI-15591
    • Antifuse
    • METIS-207465
    • IR-43804
    • light sensor

    Cite this

    Kovalgin, A. Y., Holleman, J., & van den Berg, A. (2002). Combined light/heat/gas sensor with decoupled electrical and thermal resistances. In Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 (pp. 635-648). Utrecht, The Netherlands: STW.
    Kovalgin, Alexeij Y. ; Holleman, J. ; van den Berg, Albert. / Combined light/heat/gas sensor with decoupled electrical and thermal resistances. Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands : STW, 2002. pp. 635-648
    @inproceedings{89bd5671825d400ea7f0611bfdf699e9,
    title = "Combined light/heat/gas sensor with decoupled electrical and thermal resistances",
    abstract = "This work extends our previously reported idea of maintaining a hot surface by means of dissipating power at a nano-scale conductive link (antifuse). Two approaches to the device design are considered: the hot surface can be either reduced to a sub-μm-size hotspot or maintained within a larger diameter of a few microns. The designs have an advantage of decoupling the electrical resistance and thermal resistance of the device. This paper contains the results of theoretical modelling and practical realization of the antifuse-based devices. The so-called pillar-shape antifuses have been practically realised and measured. The sensitivity to different sources of energy and thermo-electrical properties have been investigated. It appeared that a pillar-shape antifuse could perform as a combined nano-scale heat detector and light sensor. Furthermore, because of the ability to generate heat, we have studied the use of the pillar-shape antifuses for vapour sensing. First promising results showed a high response after introducing acetone (ethanol) vapour into the measuring chamber. No catalytic layer aiming at decreasing the operating temperature and increasing the sensitivity was deposited on the device surface.",
    keywords = "Gas sensor, nano-hotspot, heat sensor, EWI-15591, Antifuse, METIS-207465, IR-43804, light sensor",
    author = "Kovalgin, {Alexeij Y.} and J. Holleman and {van den Berg}, Albert",
    year = "2002",
    month = "11",
    day = "29",
    language = "English",
    isbn = "90-73461-33-2",
    pages = "635--648",
    booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",
    publisher = "STW",

    }

    Kovalgin, AY, Holleman, J & van den Berg, A 2002, Combined light/heat/gas sensor with decoupled electrical and thermal resistances. in Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. STW, Utrecht, The Netherlands, pp. 635-648, SESENS 2002, Veldhoven, Netherlands, 29/11/02.

    Combined light/heat/gas sensor with decoupled electrical and thermal resistances. / Kovalgin, Alexeij Y.; Holleman, J.; van den Berg, Albert.

    Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands : STW, 2002. p. 635-648.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Combined light/heat/gas sensor with decoupled electrical and thermal resistances

    AU - Kovalgin, Alexeij Y.

    AU - Holleman, J.

    AU - van den Berg, Albert

    PY - 2002/11/29

    Y1 - 2002/11/29

    N2 - This work extends our previously reported idea of maintaining a hot surface by means of dissipating power at a nano-scale conductive link (antifuse). Two approaches to the device design are considered: the hot surface can be either reduced to a sub-μm-size hotspot or maintained within a larger diameter of a few microns. The designs have an advantage of decoupling the electrical resistance and thermal resistance of the device. This paper contains the results of theoretical modelling and practical realization of the antifuse-based devices. The so-called pillar-shape antifuses have been practically realised and measured. The sensitivity to different sources of energy and thermo-electrical properties have been investigated. It appeared that a pillar-shape antifuse could perform as a combined nano-scale heat detector and light sensor. Furthermore, because of the ability to generate heat, we have studied the use of the pillar-shape antifuses for vapour sensing. First promising results showed a high response after introducing acetone (ethanol) vapour into the measuring chamber. No catalytic layer aiming at decreasing the operating temperature and increasing the sensitivity was deposited on the device surface.

    AB - This work extends our previously reported idea of maintaining a hot surface by means of dissipating power at a nano-scale conductive link (antifuse). Two approaches to the device design are considered: the hot surface can be either reduced to a sub-μm-size hotspot or maintained within a larger diameter of a few microns. The designs have an advantage of decoupling the electrical resistance and thermal resistance of the device. This paper contains the results of theoretical modelling and practical realization of the antifuse-based devices. The so-called pillar-shape antifuses have been practically realised and measured. The sensitivity to different sources of energy and thermo-electrical properties have been investigated. It appeared that a pillar-shape antifuse could perform as a combined nano-scale heat detector and light sensor. Furthermore, because of the ability to generate heat, we have studied the use of the pillar-shape antifuses for vapour sensing. First promising results showed a high response after introducing acetone (ethanol) vapour into the measuring chamber. No catalytic layer aiming at decreasing the operating temperature and increasing the sensitivity was deposited on the device surface.

    KW - Gas sensor

    KW - nano-hotspot

    KW - heat sensor

    KW - EWI-15591

    KW - Antifuse

    KW - METIS-207465

    KW - IR-43804

    KW - light sensor

    M3 - Conference contribution

    SN - 90-73461-33-2

    SP - 635

    EP - 648

    BT - Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002

    PB - STW

    CY - Utrecht, The Netherlands

    ER -

    Kovalgin AY, Holleman J, van den Berg A. Combined light/heat/gas sensor with decoupled electrical and thermal resistances. In Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW. 2002. p. 635-648