Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes

M.H.P. Moers, R.G. Tack, O.F.J. Noordman, F.B. Segerink, N.F. van Hulst, B. Bölger

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Abstract

A Photon Scanning Tunneling Microscope is presented in which Si3N4 cantilevers are used as optical probes. This method allows close contact scanning without tip destruction. Simultaneous measurement of the optical signal and the deflection of the cantilever permits a comparison between the optical image and the topography. The optical signal as a function of the distance clearly shows the exponential behaviour of the evanescent field. Several structures have been examined, giving a lateral resolution in the optical image of about 40 nm.
Original languageEnglish
Title of host publicationNear Field Optics
EditorsDieter W. Pohl, Daniel Courjon
Place of PublicationDeventer
PublisherKluwer Academic Publishers
Pages79-86
Number of pages8
ISBN (Electronic)978-94-011-1978-8
ISBN (Print)978-94-010-4873-6
DOIs
Publication statusPublished - 1993

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Keywords

  • Total internal reflection
  • Scanning Near field optical microscopy
  • Evanescent field
  • Frustrate total internal reflection
  • Closed loop mode

Cite this

Moers, M. H. P., Tack, R. G., Noordman, O. F. J., Segerink, F. B., van Hulst, N. F., & Bölger, B. (1993). Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes. In D. W. Pohl, & D. Courjon (Eds.), Near Field Optics (pp. 79-86). Deventer: Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-1978-8_10