Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes

M.H.P. Moers; R.G. Tack; O.F.J. Noordman; F.B. Segerink; N.F. van Hulst; B. Bölger

doi:10.1007/978-94-011-1978-8_10

Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes

M.H.P. Moers, R.G. Tack, O.F.J. Noordman, F.B. Segerink, N.F. van Hulst, B. Bölger

Optical Sciences

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Abstract

A Photon Scanning Tunneling Microscope is presented in which Si3N4 cantilevers are used as optical probes. This method allows close contact scanning without tip destruction. Simultaneous measurement of the optical signal and the deflection of the cantilever permits a comparison between the optical image and the topography. The optical signal as a function of the distance clearly shows the exponential behaviour of the evanescent field. Several structures have been examined, giving a lateral resolution in the optical image of about 40 nm.

Original language	English
Title of host publication	Near Field Optics
Editors	Dieter W. Pohl, Daniel Courjon
Place of Publication	Deventer
Publisher	Kluwer Academic Publishers
Pages	79-86
Number of pages	8
ISBN (Electronic)	978-94-011-1978-8
ISBN (Print)	978-94-010-4873-6
DOIs	https://doi.org/10.1007/978-94-011-1978-8_10
Publication status	Published - 1993

Keywords

Total internal reflection
Scanning Near field optical microscopy
Evanescent field
Frustrate total internal reflection
Closed loop mode

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10.1007/978-94-011-1978-8_10

Moers1993combinedFinal published version, 684 KB

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title = "Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes",

abstract = "A Photon Scanning Tunneling Microscope is presented in which Si3N4 cantilevers are used as optical probes. This method allows close contact scanning without tip destruction. Simultaneous measurement of the optical signal and the deflection of the cantilever permits a comparison between the optical image and the topography. The optical signal as a function of the distance clearly shows the exponential behaviour of the evanescent field. Several structures have been examined, giving a lateral resolution in the optical image of about 40 nm.",

keywords = "Total internal reflection, Scanning Near field optical microscopy, Evanescent field, Frustrate total internal reflection, Closed loop mode",

author = "M.H.P. Moers and R.G. Tack and O.F.J. Noordman and F.B. Segerink and {van Hulst}, N.F. and B. B{\"o}lger",

year = "1993",

doi = "10.1007/978-94-011-1978-8_10",

language = "English",

isbn = "978-94-010-4873-6",

pages = "79--86",

editor = "Pohl, {Dieter W.} and Daniel Courjon",

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T1 - Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes

AU - Moers, M.H.P.

AU - Tack, R.G.

AU - Noordman, O.F.J.

AU - Segerink, F.B.

AU - van Hulst, N.F.

AU - Bölger, B.

PY - 1993

Y1 - 1993

N2 - A Photon Scanning Tunneling Microscope is presented in which Si3N4 cantilevers are used as optical probes. This method allows close contact scanning without tip destruction. Simultaneous measurement of the optical signal and the deflection of the cantilever permits a comparison between the optical image and the topography. The optical signal as a function of the distance clearly shows the exponential behaviour of the evanescent field. Several structures have been examined, giving a lateral resolution in the optical image of about 40 nm.

AB - A Photon Scanning Tunneling Microscope is presented in which Si3N4 cantilevers are used as optical probes. This method allows close contact scanning without tip destruction. Simultaneous measurement of the optical signal and the deflection of the cantilever permits a comparison between the optical image and the topography. The optical signal as a function of the distance clearly shows the exponential behaviour of the evanescent field. Several structures have been examined, giving a lateral resolution in the optical image of about 40 nm.

KW - Total internal reflection

KW - Scanning Near field optical microscopy

KW - Evanescent field

KW - Frustrate total internal reflection

KW - Closed loop mode

U2 - 10.1007/978-94-011-1978-8_10

DO - 10.1007/978-94-011-1978-8_10

M3 - Chapter

SN - 978-94-010-4873-6

SP - 79

EP - 86

BT - Near Field Optics

A2 - Pohl, Dieter W.

A2 - Courjon, Daniel

PB - Kluwer Academic Publishers

CY - Deventer

ER -

Combined Photon Scanning Tunneling Microscope and Atomic Force Microscope using Silicon Nitride Probes

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Keywords

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