Combined-Pirani/bending membrane-pressure sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
56 Downloads (Pure)

Abstract

A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.
Original languageUndefined
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages328-331
Number of pages4
ISBN (Print)0-7803-7185-2
DOIs
Publication statusPublished - 20 Jan 2002
Event15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 - Las Vegas, United States
Duration: 20 Jan 200224 Jan 2002
Conference number: 15

Conference

Conference15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002
Abbreviated titleMEMS
CountryUnited States
CityLas Vegas
Period20/01/0224/01/02

Keywords

  • EWI-12731
  • IR-43326
  • METIS-206364

Cite this

van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2002). Combined-Pirani/bending membrane-pressure sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 328-331). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2002.984269
van Baar, J.J.J. ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Elwenspoek, Michael Curt. / Combined-Pirani/bending membrane-pressure sensor. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 2002. pp. 328-331
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title = "Combined-Pirani/bending membrane-pressure sensor",
abstract = "A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.",
keywords = "EWI-12731, IR-43326, METIS-206364",
author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2002",
month = "1",
day = "20",
doi = "10.1109/MEMSYS.2002.984269",
language = "Undefined",
isbn = "0-7803-7185-2",
pages = "328--331",
booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",
publisher = "IEEE Computer Society",
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}

van Baar, JJJ, Wiegerink, RJ, Lammerink, TSJ, Berenschot, JW, Krijnen, GJM & Elwenspoek, MC 2002, Combined-Pirani/bending membrane-pressure sensor. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE Computer Society, Piscataway, pp. 328-331, 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, Las Vegas, United States, 20/01/02. https://doi.org/10.1109/MEMSYS.2002.984269

Combined-Pirani/bending membrane-pressure sensor. / van Baar, J.J.J.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 2002. p. 328-331.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Combined-Pirani/bending membrane-pressure sensor

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2002/1/20

Y1 - 2002/1/20

N2 - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.

AB - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.

KW - EWI-12731

KW - IR-43326

KW - METIS-206364

U2 - 10.1109/MEMSYS.2002.984269

DO - 10.1109/MEMSYS.2002.984269

M3 - Conference contribution

SN - 0-7803-7185-2

SP - 328

EP - 331

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE Computer Society

CY - Piscataway

ER -

van Baar JJJ, Wiegerink RJ, Lammerink TSJ, Berenschot JW, Krijnen GJM, Elwenspoek MC. Combined-Pirani/bending membrane-pressure sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society. 2002. p. 328-331 https://doi.org/10.1109/MEMSYS.2002.984269