Combined-Pirani/bending membrane-pressure sensor

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)
    70 Downloads (Pure)

    Abstract

    A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages328-331
    Number of pages4
    ISBN (Print)0-7803-7185-2
    DOIs
    Publication statusPublished - 20 Jan 2002
    Event15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 - Las Vegas, United States
    Duration: 20 Jan 200224 Jan 2002
    Conference number: 15

    Conference

    Conference15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002
    Abbreviated titleMEMS
    CountryUnited States
    CityLas Vegas
    Period20/01/0224/01/02

    Keywords

    • EWI-12731
    • IR-43326
    • METIS-206364

    Cite this

    van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2002). Combined-Pirani/bending membrane-pressure sensor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 328-331). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2002.984269