Combined-Pirani/bending membrane-pressure sensor

J.J.J. van Baar; Remco J. Wiegerink; Theodorus S.J. Lammerink; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2002.984269

Combined-Pirani/bending membrane-pressure sensor

J.J.J. van Baar, Remco J. Wiegerink, Theodorus S.J. Lammerink, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

279 Downloads (Pure)

Abstract

A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	328-331
Number of pages	4
ISBN (Print)	0-7803-7185-2
DOIs	https://doi.org/10.1109/MEMSYS.2002.984269
Publication status	Published - 20 Jan 2002
Event	15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 - Las Vegas, United States Duration: 20 Jan 2002 → 24 Jan 2002 Conference number: 15

Conference

Conference	15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002
Abbreviated title	MEMS
Country/Territory	United States
City	Las Vegas
Period	20/01/02 → 24/01/02

Keywords

EWI-12731
IR-43326
METIS-206364

Access to Document

10.1109/MEMSYS.2002.984269

Cite this

@inproceedings{38f3ab1e46db45ddb9d2eee13b0eb7c9,

title = "Combined-Pirani/bending membrane-pressure sensor",

abstract = "A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.",

keywords = "EWI-12731, IR-43326, METIS-206364",

author = "\{van Baar\}, J.J.J. and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Berenschot, \{Johan W.\} and Krijnen, \{Gijsbertus J.M.\} and Elwenspoek, \{Michael Curt\}",

year = "2002",

month = jan,

day = "20",

doi = "10.1109/MEMSYS.2002.984269",

language = "Undefined",

isbn = "0-7803-7185-2",

pages = "328--331",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

}

van Baar, JJJ, Wiegerink, RJ, Lammerink, TSJ, Berenschot, JW , Krijnen, GJM & Elwenspoek, MC 2002, Combined-Pirani/bending membrane-pressure sensor. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, pp. 328-331, 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, Las Vegas, Nevada, United States, 20/01/02. https://doi.org/10.1109/MEMSYS.2002.984269

TY - GEN

T1 - Combined-Pirani/bending membrane-pressure sensor

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 15

PY - 2002/1/20

Y1 - 2002/1/20

N2 - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.

AB - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor.

KW - EWI-12731

KW - IR-43326

KW - METIS-206364

U2 - 10.1109/MEMSYS.2002.984269

DO - 10.1109/MEMSYS.2002.984269

M3 - Conference contribution

SN - 0-7803-7185-2

SP - 328

EP - 331

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

ER -