Compact integrated optical devices for optical sensor and switching applications

L.J. Kauppinen

doi:10.3990/1.9789036530880

Compact integrated optical devices for optical sensor and switching applications

L.J. Kauppinen

University of Twente

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

This thesis describes the design, fabrication, and characterization of compact optical devices for sensing and switching applications. Our focus has been to realize the devices using CMOS-compatible fabrication processes. Particularly the silicon photonics fabrication platform, ePIXfab, has been used for this purpose.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Pollnau, M., Supervisor de Ridder, R.M., Co-Supervisor
Thesis sponsors	NanoNed
Award date	7 Oct 2010
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-3088-0
DOIs	https://doi.org/10.3990/1.9789036530880
Publication status	Published - 7 Oct 2010

Keywords

IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
Photonic crystal (PhC)
Electrostatic actuation
MEMS
Cantilever
Ring resonators
Optical switching
Chemo-optical sensing
Nanomechano-optics
Wavelength routing
Waveguide grating

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Thesis L.J. KauppinenFinal published version, 17 MB

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@phdthesis{2d0d262a0f9844ac93d23debb718ee51,

title = "Compact integrated optical devices for optical sensor and switching applications",

abstract = "This thesis describes the design, fabrication, and characterization of compact optical devices for sensing and switching applications. Our focus has been to realize the devices using CMOS-compatible fabrication processes. Particularly the silicon photonics fabrication platform, ePIXfab, has been used for this purpose.",

keywords = "IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, Photonic crystal (PhC), Electrostatic actuation, MEMS, Cantilever, Ring resonators, Optical switching, Chemo-optical sensing, Nanomechano-optics, Wavelength routing, Waveguide grating",

author = "L.J. Kauppinen",

note = "10.3990/1.9789036530880 ",

year = "2010",

month = oct,

day = "7",

doi = "10.3990/1.9789036530880",

language = "English",

isbn = "978-90-365-3088-0",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}

TY - THES

T1 - Compact integrated optical devices for optical sensor and switching applications

AU - Kauppinen, L.J.

N1 - 10.3990/1.9789036530880

PY - 2010/10/7

Y1 - 2010/10/7

N2 - This thesis describes the design, fabrication, and characterization of compact optical devices for sensing and switching applications. Our focus has been to realize the devices using CMOS-compatible fabrication processes. Particularly the silicon photonics fabrication platform, ePIXfab, has been used for this purpose.

AB - This thesis describes the design, fabrication, and characterization of compact optical devices for sensing and switching applications. Our focus has been to realize the devices using CMOS-compatible fabrication processes. Particularly the silicon photonics fabrication platform, ePIXfab, has been used for this purpose.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

KW - Photonic crystal (PhC)

KW - Electrostatic actuation

KW - MEMS

KW - Cantilever

KW - Ring resonators

KW - Optical switching

KW - Chemo-optical sensing

KW - Nanomechano-optics

KW - Wavelength routing

KW - Waveguide grating

U2 - 10.3990/1.9789036530880

DO - 10.3990/1.9789036530880

M3 - PhD Thesis - Research UT, graduation UT

SN - 978-90-365-3088-0

PB - University of Twente

CY - Enschede

ER -

Compact integrated optical devices for optical sensor and switching applications

Abstract

Keywords

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