Compact integrated optical sensors based on a Si3N4 grated waveguide optical cavity

P.V.S. Pham Van So, Mindert Dijkstra, Anton Hollink, R.M. de Ridder, Markus Pollnau, Hugo Hoekstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We demonstrate the versatility of a silicon nitride grated waveguide optical cavity as compact integrated optical sensors for (bulk) concentration detection, label-free protein sensing, and - with an integrated cantilever suspended above it - gas sensing.
    Original languageUndefined
    Title of host publicationConference on Lasers and Electro-Optics, CLEO/Europe
    Place of PublicationWashington, DC
    PublisherOptical Society of America
    PagesPaper CK2.1
    Number of pages1
    ISBN (Print)978-1-4577-0532-8
    Publication statusPublished - May 2011
    EventEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009 - Munich, Germany
    Duration: 22 May 201126 May 2011

    Publication series

    Name
    PublisherOptical Society of America

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
    Abbreviated titleCLEO-Europe/EQEC 2011
    CountryGermany
    CityMunich
    Period22/05/1126/05/11

    Keywords

    • METIS-277688
    • EWI-20270
    • IOMS-SNS: SENSORS
    • IR-77577

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