Abstract
In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).
Original language | Undefined |
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Title of host publication | Proceedings of the 1st International Conference on Microfluidic Handling Systems |
Place of Publication | Enschede |
Publisher | University of Twente |
Pages | 30-33 |
Number of pages | 4 |
ISBN (Print) | not assigned |
Publication status | Published - 10 Oct 2012 |
Event | 1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands Duration: 10 Oct 2012 → 12 Oct 2012 Conference number: 1 https://www.utwente.nl/en/eemcs/mfhs2012/ |
Publication series
Name | |
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Publisher | University of Twente |
Conference
Conference | 1st International Conference on MicroFluidic Handling Systems, MFHS 2012 |
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Abbreviated title | MFHS |
Country/Territory | Netherlands |
City | Enschede |
Period | 10/10/12 → 12/10/12 |
Internet address |
Keywords
- EWI-22792
- METIS-296192
- IR-83476