Compact mass flow meter based on a micro Coriolis flow sensor

W. Sparreboom; M. Katerberg; T.S.J. Lammerink; F.M. Postma; J. Haneveld; J. Groenesteijn; R.J. Wiegerink; J.C. Lötters

Compact mass flow meter based on a micro Coriolis flow sensor

W. Sparreboom, M. Katerberg, T.S.J. Lammerink, F.M. Postma, J. Haneveld, J. Groenesteijn, R.J. Wiegerink, J.C. Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).

Original language	English
Title of host publication	Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands
Place of Publication	Enschede
Publisher	University of Twente
Pages	30-33
Number of pages	4
Publication status	Published - 10 Oct 2012
Event	1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands Duration: 10 Oct 2012 → 12 Oct 2012 Conference number: 1 https://www.utwente.nl/en/eemcs/mfhs2012/

Conference

Conference	1st International Conference on MicroFluidic Handling Systems, MFHS 2012
Abbreviated title	MFHS
Country/Territory	Netherlands
City	Enschede
Period	10/10/12 → 12/10/12
Internet address	https://www.utwente.nl/en/eemcs/mfhs2012/

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Compact mass flow meter based on a micro coriolis flow sensor
Sparreboom, W., van de Geest, J., Katerberg, M., Postma, F., Haneveld, J., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J., 2013, In: Micromachines. 4, 1, p. 22-33 12 p.
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Sparreboom, W., Katerberg, M., Lammerink, T. S. J., Postma, F. M., Haneveld, J., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2012). Compact mass flow meter based on a micro Coriolis flow sensor. In Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands (pp. 30-33). University of Twente.

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title = "Compact mass flow meter based on a micro Coriolis flow sensor",

abstract = "In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).",

author = "W. Sparreboom and M. Katerberg and T.S.J. Lammerink and F.M. Postma and J. Haneveld and J. Groenesteijn and R.J. Wiegerink and J.C. L{\"o}tters",

year = "2012",

month = oct,

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language = "English",

pages = "30--33",

booktitle = "Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands",

publisher = "University of Twente",

address = "Netherlands",

note = "1st International Conference on MicroFluidic Handling Systems, MFHS 2012, MFHS ; Conference date: 10-10-2012 Through 12-10-2012",

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Sparreboom, W, Katerberg, M, Lammerink, TSJ, Postma, FM, Haneveld, J, Groenesteijn, J , Wiegerink, RJ & Lötters, JC 2012, Compact mass flow meter based on a micro Coriolis flow sensor. in Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands. University of Twente, Enschede, pp. 30-33, 1st International Conference on MicroFluidic Handling Systems, MFHS 2012, Enschede, Netherlands, 10/10/12.

Compact mass flow meter based on a micro Coriolis flow sensor. / Sparreboom, W.; Katerberg, M.; Lammerink, T.S.J. et al.
Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands. Enschede: University of Twente, 2012. p. 30-33.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Compact mass flow meter based on a micro Coriolis flow sensor

AU - Sparreboom, W.

AU - Katerberg, M.

AU - Lammerink, T.S.J.

AU - Postma, F.M.

AU - Haneveld, J.

AU - Groenesteijn, J.

AU - Wiegerink, R.J.

AU - Lötters, J.C.

N1 - Conference code: 1

PY - 2012/10/10

Y1 - 2012/10/10

N2 - In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).

AB - In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).

M3 - Conference contribution

SP - 30

EP - 33

BT - Proceedings of the 1st International Conference on Microfluidic Handling Systems, 10–12 October 2012, Enschede, The Netherlands

PB - University of Twente

CY - Enschede

T2 - 1st International Conference on MicroFluidic Handling Systems, MFHS 2012

Y2 - 10 October 2012 through 12 October 2012

ER -

Compact mass flow meter based on a micro Coriolis flow sensor

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Compact mass flow meter based on a micro coriolis flow sensor

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