Compact mass flow meter based on a micro Coriolis flow sensor

Wouter Sparreboom, M.R. Katerberg, Theodorus S.J. Lammerink, F.M. Postma, J. Haneveld, Jarno Groenesteijn, Remco J. Wiegerink, Joost Conrad Lötters

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    Abstract

    In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).
    Original languageUndefined
    Title of host publicationProceedings of the 1st International Conference on Microfluidic Handling Systems
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Pages30-33
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 10 Oct 2012
    Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
    Duration: 10 Oct 201212 Oct 2012
    Conference number: 1
    https://www.utwente.nl/en/eemcs/mfhs2012/

    Publication series

    Name
    PublisherUniversity of Twente

    Conference

    Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period10/10/1212/10/12
    Internet address

    Keywords

    • EWI-22792
    • METIS-296192
    • IR-83476

    Cite this

    Sparreboom, W., Katerberg, M. R., Lammerink, T. S. J., Postma, F. M., Haneveld, J., Groenesteijn, J., ... Lötters, J. C. (2012). Compact mass flow meter based on a micro Coriolis flow sensor. In Proceedings of the 1st International Conference on Microfluidic Handling Systems (pp. 30-33). Enschede: University of Twente.