Compact mass flow meter based on a micro Coriolis flow sensor

Wouter Sparreboom, M.R. Katerberg, Theodorus S.J. Lammerink, F.M. Postma, J. Haneveld, Jarno Groenesteijn, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).
Original languageUndefined
Title of host publicationProceedings of the 1st International Conference on Microfluidic Handling Systems
Place of PublicationEnschede
PublisherUniversity of Twente
Pages30-33
Number of pages4
ISBN (Print)not assigned
Publication statusPublished - 10 Oct 2012
Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
Duration: 10 Oct 201212 Oct 2012
Conference number: 1
https://www.utwente.nl/en/eemcs/mfhs2012/

Publication series

Name
PublisherUniversity of Twente

Conference

Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
Abbreviated titleMFHS
CountryNetherlands
CityEnschede
Period10/10/1212/10/12
Internet address

Keywords

  • EWI-22792
  • METIS-296192
  • IR-83476

Cite this

Sparreboom, W., Katerberg, M. R., Lammerink, T. S. J., Postma, F. M., Haneveld, J., Groenesteijn, J., ... Lötters, J. C. (2012). Compact mass flow meter based on a micro Coriolis flow sensor. In Proceedings of the 1st International Conference on Microfluidic Handling Systems (pp. 30-33). Enschede: University of Twente.
Sparreboom, Wouter ; Katerberg, M.R. ; Lammerink, Theodorus S.J. ; Postma, F.M. ; Haneveld, J. ; Groenesteijn, Jarno ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Compact mass flow meter based on a micro Coriolis flow sensor. Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede : University of Twente, 2012. pp. 30-33
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title = "Compact mass flow meter based on a micro Coriolis flow sensor",
abstract = "In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5{\%} reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).",
keywords = "EWI-22792, METIS-296192, IR-83476",
author = "Wouter Sparreboom and M.R. Katerberg and Lammerink, {Theodorus S.J.} and F.M. Postma and J. Haneveld and Jarno Groenesteijn and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
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year = "2012",
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publisher = "University of Twente",
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Sparreboom, W, Katerberg, MR, Lammerink, TSJ, Postma, FM, Haneveld, J, Groenesteijn, J, Wiegerink, RJ & Lötters, JC 2012, Compact mass flow meter based on a micro Coriolis flow sensor. in Proceedings of the 1st International Conference on Microfluidic Handling Systems. University of Twente, Enschede, pp. 30-33, 1st International Conference on MicroFluidic Handling Systems, MFHS 2012, Enschede, Netherlands, 10/10/12.

Compact mass flow meter based on a micro Coriolis flow sensor. / Sparreboom, Wouter; Katerberg, M.R.; Lammerink, Theodorus S.J.; Postma, F.M.; Haneveld, J.; Groenesteijn, Jarno; Wiegerink, Remco J.; Lötters, Joost Conrad.

Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede : University of Twente, 2012. p. 30-33.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Compact mass flow meter based on a micro Coriolis flow sensor

AU - Sparreboom, Wouter

AU - Katerberg, M.R.

AU - Lammerink, Theodorus S.J.

AU - Postma, F.M.

AU - Haneveld, J.

AU - Groenesteijn, Jarno

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - http://www.utwente.nl/ewi/mfhs2012/

PY - 2012/10/10

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N2 - In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).

AB - In this paper we present a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 2 g/h (for water at a pressure drop of 2 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading. The temperature drift between 10 and 50 ºC is below 1 mg/h/ºC. The meter is robust, has standard fluidic connections and can be read out by a PC or laptop via USB. Its performance was tested for several common gases (helium, nitrogen, argon and air) and liquids (water and IPA).

KW - EWI-22792

KW - METIS-296192

KW - IR-83476

M3 - Conference contribution

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BT - Proceedings of the 1st International Conference on Microfluidic Handling Systems

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Sparreboom W, Katerberg MR, Lammerink TSJ, Postma FM, Haneveld J, Groenesteijn J et al. Compact mass flow meter based on a micro Coriolis flow sensor. In Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente. 2012. p. 30-33