Compact mass flow meter based on a micro coriolis flow sensor

Wouter Sparreboom; Jan van de Geest; Marcel Katerberg; F.M. Postma; J. Haneveld; Jarno Groenesteijn; Theodorus S.J. Lammerink; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.3390/mi4010022

Compact mass flow meter based on a micro coriolis flow sensor

Wouter Sparreboom, Jan van de Geest, Marcel Katerberg, F.M. Postma, J. Haneveld, Jarno Groenesteijn, Theodorus S.J. Lammerink, Remco J. Wiegerink, Joost Conrad Lötters

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Abstract

In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg.

Original language	English
Pages (from-to)	22-33
Number of pages	12
Journal	Micromachines
Volume	4
Issue number	1
DOIs	https://doi.org/10.3390/mi4010022
Publication status	Published - 2013

Keywords

UT-Gold-D

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title = "Compact mass flow meter based on a micro coriolis flow sensor",

abstract = "In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg.",

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AU - Sparreboom, Wouter

AU - van de Geest, Jan

AU - Katerberg, Marcel

AU - Postma, F.M.

AU - Haneveld, J.

AU - Groenesteijn, Jarno

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

PY - 2013

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AB - In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg.

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Compact mass flow meter based on a micro coriolis flow sensor

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