Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Parikshit  Phadke; J.M. Sturm; Robbert W.E. van de Kruijs; F. Bijkerk

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Parikshit Phadke, J.M. Sturm, Robbert W.E. van de Kruijs, F. Bijkerk

XUV Optics

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Abstract

Mass loss or gain in transition metals exposed to energetic particles is relevant to many applications, from thin film processing, to EUV lithography, and fusion research. Understanding the interaction of ions with surfaces near the sputter threshold becomes essential in ascertaining damage to metallic films, whether it’s ‘fuzz’ growth in tungsten, target poisoning in coating technologies or mirror degradation in EUV lithography. We compare the sputtering of transition metals such as Mo, W and Ru under neon, nitrogen and oxygen ion exposure in the energy range of 50-300 eV. Monte Carlo simulations using TRIDYN are performed to evaluate the surface binding energy and composition of the steady state sputtered surface.

Original language	English
Publication status	Published - 21 Jan 2019
Event	Physics@Veldhoven 2019 - De Koningshof, Veldhoven, Netherlands Duration: 22 Jan 2019 → 23 Jan 2019 https://www.nwo.nl/en/news-and-events/events/physicsveldhoven

Conference

Conference	Physics@Veldhoven 2019
Country/Territory	Netherlands
City	Veldhoven
Period	22/01/19 → 23/01/19
Internet address	https://www.nwo.nl/en/news-and-events/events/physicsveldhoven

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abstract = "Mass loss or gain in transition metals exposed to energetic particles is relevant to many applications, from thin film processing, to EUV lithography, and fusion research. Understanding the interaction of ions with surfaces near the sputter threshold becomes essential in ascertaining damage to metallic films, whether it{\textquoteright}s {\textquoteleft}fuzz{\textquoteright} growth in tungsten, target poisoning in coating technologies or mirror degradation in EUV lithography. We compare the sputtering of transition metals such as Mo, W and Ru under neon, nitrogen and oxygen ion exposure in the energy range of 50-300 eV. Monte Carlo simulations using TRIDYN are performed to evaluate the surface binding energy and composition of the steady state sputtered surface. ",

author = "Parikshit Phadke and J.M. Sturm and {van de Kruijs}, {Robbert W.E.} and F. Bijkerk",

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language = "English",

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T1 - Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

AU - Phadke, Parikshit

AU - Sturm, J.M.

AU - van de Kruijs, Robbert W.E.

AU - Bijkerk, F.

PY - 2019/1/21

Y1 - 2019/1/21

N2 - Mass loss or gain in transition metals exposed to energetic particles is relevant to many applications, from thin film processing, to EUV lithography, and fusion research. Understanding the interaction of ions with surfaces near the sputter threshold becomes essential in ascertaining damage to metallic films, whether it’s ‘fuzz’ growth in tungsten, target poisoning in coating technologies or mirror degradation in EUV lithography. We compare the sputtering of transition metals such as Mo, W and Ru under neon, nitrogen and oxygen ion exposure in the energy range of 50-300 eV. Monte Carlo simulations using TRIDYN are performed to evaluate the surface binding energy and composition of the steady state sputtered surface.

AB - Mass loss or gain in transition metals exposed to energetic particles is relevant to many applications, from thin film processing, to EUV lithography, and fusion research. Understanding the interaction of ions with surfaces near the sputter threshold becomes essential in ascertaining damage to metallic films, whether it’s ‘fuzz’ growth in tungsten, target poisoning in coating technologies or mirror degradation in EUV lithography. We compare the sputtering of transition metals such as Mo, W and Ru under neon, nitrogen and oxygen ion exposure in the energy range of 50-300 eV. Monte Carlo simulations using TRIDYN are performed to evaluate the surface binding energy and composition of the steady state sputtered surface.

M3 - Poster

T2 - Physics@Veldhoven 2019

Y2 - 22 January 2019 through 23 January 2019

ER -

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

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