Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films

H. Nazeer, Duc Minh Nguyen, L.A. Woldering, Augustinus J.H.M. Rijnders, Michael Curt Elwenspoek, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young's modulus of Pb(Zrx,Ti1-x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observed which makes it an exciting piezoelectric material for the development of actuators and highly sensitive sensors. Our investigation of the compositional distribution of the piezoelectric coefficient (d33,f) for 250 nm thick films shows a maximum value of 93 pm/V for x=0.52. The static deflection of the cantilevers, measured after the deposition of PZT thin films was used to determine the residual stress for various compositions. The observed trend in the residual stress of PZT thin films is attributed to the varying coefficient of thermal expansion for different compositions. The Young's modulus of the PZT thin films was determined by measuring the flexural resonance frequency of the cantilevers both before and after the deposition. The Young's modulus increases for the zirconium rich PZT compositions, which is in agreement with the trend observed in their bulk ceramic counterparts.
Original languageUndefined
Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of PublicationNorway
PublisherDepartment of micro and nano systems technology, Vestfold University College
Pages238-241
Number of pages4
ISBN (Print)978-82-7860-224-9
Publication statusPublished - 2011
Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
Duration: 19 Jun 201122 Jun 2011
Conference number: 22

Publication series

Name
PublisherVestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated titleMME
CountryNorway
CityTønsberg
Period19/06/1122/06/11

Keywords

  • METIS-285015
  • Cantilevers
  • IR-79397
  • Young’s modulus
  • d33
  • f
  • EWI-21307
  • PZT
  • Resonance frequency
  • Residual Stress
  • TST-uSPAM: micro Scanning Probe Array Memory
  • TST-SMI: Formerly in EWI-SMI
  • PLD

Cite this

Nazeer, H., Nguyen, D. M., Woldering, L. A., Rijnders, A. J. H. M., Elwenspoek, M. C., & Abelmann, L. (2011). Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 238-241). Norway: Department of micro and nano systems technology, Vestfold University College.
Nazeer, H. ; Nguyen, Duc Minh ; Woldering, L.A. ; Rijnders, Augustinus J.H.M. ; Elwenspoek, Michael Curt ; Abelmann, Leon. / Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway : Department of micro and nano systems technology, Vestfold University College, 2011. pp. 238-241
@inproceedings{f4ef3862561846ec9177d67f3be6ae5c,
title = "Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films",
abstract = "In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young's modulus of Pb(Zrx,Ti1-x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observed which makes it an exciting piezoelectric material for the development of actuators and highly sensitive sensors. Our investigation of the compositional distribution of the piezoelectric coefficient (d33,f) for 250 nm thick films shows a maximum value of 93 pm/V for x=0.52. The static deflection of the cantilevers, measured after the deposition of PZT thin films was used to determine the residual stress for various compositions. The observed trend in the residual stress of PZT thin films is attributed to the varying coefficient of thermal expansion for different compositions. The Young's modulus of the PZT thin films was determined by measuring the flexural resonance frequency of the cantilevers both before and after the deposition. The Young's modulus increases for the zirconium rich PZT compositions, which is in agreement with the trend observed in their bulk ceramic counterparts.",
keywords = "METIS-285015, Cantilevers, IR-79397, Young’s modulus, d33, f, EWI-21307, PZT, Resonance frequency, Residual Stress, TST-uSPAM: micro Scanning Probe Array Memory, TST-SMI: Formerly in EWI-SMI, PLD",
author = "H. Nazeer and Nguyen, {Duc Minh} and L.A. Woldering and Rijnders, {Augustinus J.H.M.} and Elwenspoek, {Michael Curt} and Leon Abelmann",
note = "http://www.mme2011.org/MME2011_Proceedings.pdf",
year = "2011",
language = "Undefined",
isbn = "978-82-7860-224-9",
publisher = "Department of micro and nano systems technology, Vestfold University College",
pages = "238--241",
booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

}

Nazeer, H, Nguyen, DM, Woldering, LA, Rijnders, AJHM, Elwenspoek, MC & Abelmann, L 2011, Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Department of micro and nano systems technology, Vestfold University College, Norway, pp. 238-241, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. / Nazeer, H.; Nguyen, Duc Minh; Woldering, L.A.; Rijnders, Augustinus J.H.M.; Elwenspoek, Michael Curt; Abelmann, Leon.

Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway : Department of micro and nano systems technology, Vestfold University College, 2011. p. 238-241.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films

AU - Nazeer, H.

AU - Nguyen, Duc Minh

AU - Woldering, L.A.

AU - Rijnders, Augustinus J.H.M.

AU - Elwenspoek, Michael Curt

AU - Abelmann, Leon

N1 - http://www.mme2011.org/MME2011_Proceedings.pdf

PY - 2011

Y1 - 2011

N2 - In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young's modulus of Pb(Zrx,Ti1-x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observed which makes it an exciting piezoelectric material for the development of actuators and highly sensitive sensors. Our investigation of the compositional distribution of the piezoelectric coefficient (d33,f) for 250 nm thick films shows a maximum value of 93 pm/V for x=0.52. The static deflection of the cantilevers, measured after the deposition of PZT thin films was used to determine the residual stress for various compositions. The observed trend in the residual stress of PZT thin films is attributed to the varying coefficient of thermal expansion for different compositions. The Young's modulus of the PZT thin films was determined by measuring the flexural resonance frequency of the cantilevers both before and after the deposition. The Young's modulus increases for the zirconium rich PZT compositions, which is in agreement with the trend observed in their bulk ceramic counterparts.

AB - In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young's modulus of Pb(Zrx,Ti1-x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observed which makes it an exciting piezoelectric material for the development of actuators and highly sensitive sensors. Our investigation of the compositional distribution of the piezoelectric coefficient (d33,f) for 250 nm thick films shows a maximum value of 93 pm/V for x=0.52. The static deflection of the cantilevers, measured after the deposition of PZT thin films was used to determine the residual stress for various compositions. The observed trend in the residual stress of PZT thin films is attributed to the varying coefficient of thermal expansion for different compositions. The Young's modulus of the PZT thin films was determined by measuring the flexural resonance frequency of the cantilevers both before and after the deposition. The Young's modulus increases for the zirconium rich PZT compositions, which is in agreement with the trend observed in their bulk ceramic counterparts.

KW - METIS-285015

KW - Cantilevers

KW - IR-79397

KW - Young’s modulus

KW - d33

KW - f

KW - EWI-21307

KW - PZT

KW - Resonance frequency

KW - Residual Stress

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TST-SMI: Formerly in EWI-SMI

KW - PLD

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 238

EP - 241

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

PB - Department of micro and nano systems technology, Vestfold University College

CY - Norway

ER -

Nazeer H, Nguyen DM, Woldering LA, Rijnders AJHM, Elwenspoek MC, Abelmann L. Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway: Department of micro and nano systems technology, Vestfold University College. 2011. p. 238-241