Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films

H. Nazeer, Duc Minh Nguyen, L.A. Woldering, Augustinus J.H.M. Rijnders, Michael Curt Elwenspoek, Leon Abelmann

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Abstract

In this contribution we present the compositional dependence of the longitudinal piezoelectric coefficient (d33,f), residual stress and Young's modulus of Pb(Zrx,Ti1-x)O3 (PZT) thin films. Pulsed laser deposition (PLD) was used to deposit epitaxial PZT thin films with a < 110 > preferred orientation on silicon cantilevers. By using PLD, excellent piezoelectric properties of the PZT were observed which makes it an exciting piezoelectric material for the development of actuators and highly sensitive sensors. Our investigation of the compositional distribution of the piezoelectric coefficient (d33,f) for 250 nm thick films shows a maximum value of 93 pm/V for x=0.52. The static deflection of the cantilevers, measured after the deposition of PZT thin films was used to determine the residual stress for various compositions. The observed trend in the residual stress of PZT thin films is attributed to the varying coefficient of thermal expansion for different compositions. The Young's modulus of the PZT thin films was determined by measuring the flexural resonance frequency of the cantilevers both before and after the deposition. The Young's modulus increases for the zirconium rich PZT compositions, which is in agreement with the trend observed in their bulk ceramic counterparts.
Original languageUndefined
Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of PublicationNorway
PublisherDepartment of micro and nano systems technology, Vestfold University College
Pages238-241
Number of pages4
ISBN (Print)978-82-7860-224-9
Publication statusPublished - 2011
Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
Duration: 19 Jun 201122 Jun 2011
Conference number: 22

Publication series

Name
PublisherVestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated titleMME
CountryNorway
CityTønsberg
Period19/06/1122/06/11

Keywords

  • METIS-285015
  • Cantilevers
  • IR-79397
  • Young’s modulus
  • d33
  • f
  • EWI-21307
  • PZT
  • Resonance frequency
  • Residual Stress
  • TST-uSPAM: micro Scanning Probe Array Memory
  • TST-SMI: Formerly in EWI-SMI
  • PLD

Cite this

Nazeer, H., Nguyen, D. M., Woldering, L. A., Rijnders, A. J. H. M., Elwenspoek, M. C., & Abelmann, L. (2011). Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O3 thin films. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 238-241). Norway: Department of micro and nano systems technology, Vestfold University College.