Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Igor  Milov; Igor A. Makhotkin; Ryszard Sobierajski; Nikita Medvedev; Vladimir Lipp; B. Ziaja; V. Khokhlov; V. Zhakhovsky; Yu. Petrov; V. Shepelev; D. Ilnitsky; K. Migdal; N. Inogamov; Viacheslav Medvedev; Eric  Louis; F. Bijkerk

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

Igor Milov, Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)

XUV Optics

Research output: Contribution to conference › Poster › Academic

Original language	English
Number of pages	1
Publication status	Published - 23 Jan 2018
Event	Physics@Veldhoven 2018 - NH Conference Center Koningshof, Velhoven, Netherlands Duration: 23 Jan 2018 → 24 Jan 2018 https://www.nwo-i.nl/agenda/agenda/physicsveldhoven-2018/

Conference

Conference	Physics@Veldhoven 2018
Country/Territory	Netherlands
City	Velhoven
Period	23/01/18 → 24/01/18
Internet address	https://www.nwo-i.nl/agenda/agenda/physicsveldhoven-2018/

1 Poster

Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses
Milov, I., Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), Lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor), 25 Jan 2018. 1 p.
Research output: Contribution to conference › Poster › Academic

Cite this

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., Lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnitsky, D., Migdal, K., Inogamov, N., Medvedev, V., Louis, E., & Bijkerk, F. (2018). Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses. Poster session presented at Physics@Veldhoven 2018, Velhoven, Netherlands.

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title = "Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses",

author = "Igor Milov and Makhotkin, {Igor A.} and Ryszard Sobierajski and Nikita Medvedev and Vladimir Lipp and B. Ziaja and V. Khokhlov and V. Zhakhovsky and Yu. Petrov and V. Shepelev and D. Ilnitsky and K. Migdal and N. Inogamov and Viacheslav Medvedev and Eric Louis and F. Bijkerk",

year = "2018",

month = jan,

day = "23",

language = "English",

note = "Physics@Veldhoven 2018 ; Conference date: 23-01-2018 Through 24-01-2018",

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T1 - Comprehensive studies of single-shot damage of Ru thin films induced by EUV FEL fs pulses

AU - Milov, Igor

A2 - Makhotkin, Igor A.

A2 - Sobierajski, Ryszard

A2 - Medvedev, Nikita

A2 - Lipp, Vladimir

A2 - Ziaja, B.

A2 - Khokhlov, V.

A2 - Zhakhovsky, V.

A2 - Petrov, Yu.

A2 - Shepelev, V.

A2 - Ilnitsky, D.

A2 - Migdal, K.

A2 - Inogamov, N.

A2 - Medvedev, Viacheslav

A2 - Louis, Eric

A2 - Bijkerk, F.

PY - 2018/1/23

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M3 - Poster

T2 - Physics@Veldhoven 2018

Y2 - 23 January 2018 through 24 January 2018

ER -