Computer simulation of orientation-dependent Si-etching

E. van Veenendaal, J. van Suchtelen

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationLunteren
    Publication statusPublished - 9 Jan 1997

    Keywords

    • METIS-114702

    Cite this

    van Veenendaal, E., & van Suchtelen, J. (1997, Jan 9). Computer simulation of orientation-dependent Si-etching. Lunteren.