Computer simulation of orientation-dependent Si-etching

E. van Veenendaal, J. van Suchtelen

    Research output: Contribution to conference › Poster › Other research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 16 Mar 1997
    EventCAD for MEMS '97 Workshop - Technopark Zurich, Zurich, Switzerland
    Duration: 16 Mar 1997 → 18 Mar 1997

    Workshop

    WorkshopCAD for MEMS '97 Workshop
    Country/TerritorySwitzerland
    CityZurich
    Period16/03/97 → 18/03/97

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