Concept of a neural system for real-time evaluation of spectroscopic measurements

L. Redei, M. Fried, T. Lohner, O. Polgar, I. Barsony, Sz. Fórizs, Z.G. Horvath, J. Humlicek, H. Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    A hardware implementation of a Backpropagation feedforward neural network has been designed. The tool was proposed for reflectometric measurements integrated together with photosensor arrays. The intelligent reflectometric sensor is being implemented in a multi-chip-module approach. A logarithmic input transformation is applied for easing the misalignment and parameter scatter correction. It also allows for easy ratio calculation by subtraction for normalization with the reference value. The neural network was designed for complexities up to 100 inputs, 30 hidden neurons and 5 outputs. The digital building blocks (neurons) utilize a logic approximation of the sigmoid nonlinearity and the possibility of weight scaling. These hardware solutions result in a simultaneous area reduction and speed gain, at the cost of slightly decreased performance. Simulations of the proposed neural system prove applicability for evaluation of optical measurements were performed for reflectometric and ellipsometric data thin porous layers. Hardware simulations showed good correspondence to the optimum-case neural software simulations.
    Original languageEnglish
    Title of host publicationOPTIKA '98
    Subtitle of host publication5th Congress on Modern Optics, 1998, Budapest, Hungary
    EditorsGyorgy Akos, Gabor Lupkovics, Andras Podmaniczky
    Place of PublicationBellingham, WA
    PublisherSPIE
    Pages155-159
    Number of pages5
    ISBN (Print)9780819430380
    DOIs
    Publication statusPublished - 14 Sep 1998
    Event5th Congress on Modern Optics, OPTIKA 1998 - Budapest, Hungary
    Duration: 14 Sep 199817 Sep 1998
    Conference number: 5

    Publication series

    NameSPIE proceedings series
    PublisherSPIE
    Volume3573

    Conference

    Conference5th Congress on Modern Optics, OPTIKA 1998
    Abbreviated titleOPTIKA
    CountryHungary
    CityBudapest
    Period14/09/9817/09/98

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