Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition

I.M. Dildar, D. Boltje, M.B.S. Hesselberth, Q. Xu, H.W. Zandbergen, Sybolt Harkema, J. Aarts

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Abstract

There is much interest in interfaces between insulating oxides, such as SrTiO3 (STO) and LaAlO3 (LAO), where a two dimensional electron gas can form due to the so-called polar discontinuity. These interfaces are mostly fabricated by Pulsed Laser Deposition (PLD). We have investigated such interfaces by reactive RF sputtering in a high-pressure oxygen atmosphere. The films are smooth and crystalline. Transmission Electron Microscopy indicates that the interfaces are sharp and continuous while Electron Energy Loss Spectroscopy data indicate some slight intermixing. However, we find these interfaces to be non-conducting. It appears that the sputtered interface is not electronically reconstructed in the way reported for films grown by PLD, notwithstanding the good structural quality and composition of the films
Original languageEnglish
Pages (from-to)619-623
Number of pages4
Journale-Journal of surface science and nanotechnology
Volume10
DOIs
Publication statusPublished - 2012

Fingerprint

Sputter deposition
Lasers
Electron Energy-Loss Spectroscopy
Pulsed laser deposition
conductivity
Transmission Electron Microscopy
Atmosphere
Oxides
Two dimensional electron gas
Electron energy loss spectroscopy
Gases
Electrons
Oxygen
Pressure
pulsed laser deposition
Sputtering
Crystalline materials
Transmission electron microscopy
high pressure oxygen
Chemical analysis

Keywords

  • IR-82498
  • METIS-290580

Cite this

Dildar, I. M., Boltje, D., Hesselberth, M. B. S., Xu, Q., Zandbergen, H. W., Harkema, S., & Aarts, J. (2012). Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition. e-Journal of surface science and nanotechnology, 10, 619-623. https://doi.org/10.1380/ejssnt.2012.619
Dildar, I.M. ; Boltje, D. ; Hesselberth, M.B.S. ; Xu, Q. ; Zandbergen, H.W. ; Harkema, Sybolt ; Aarts, J. / Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition. In: e-Journal of surface science and nanotechnology. 2012 ; Vol. 10. pp. 619-623.
@article{dcdee5760a7c4715b26b4e065430d4ad,
title = "Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition",
abstract = "There is much interest in interfaces between insulating oxides, such as SrTiO3 (STO) and LaAlO3 (LAO), where a two dimensional electron gas can form due to the so-called polar discontinuity. These interfaces are mostly fabricated by Pulsed Laser Deposition (PLD). We have investigated such interfaces by reactive RF sputtering in a high-pressure oxygen atmosphere. The films are smooth and crystalline. Transmission Electron Microscopy indicates that the interfaces are sharp and continuous while Electron Energy Loss Spectroscopy data indicate some slight intermixing. However, we find these interfaces to be non-conducting. It appears that the sputtered interface is not electronically reconstructed in the way reported for films grown by PLD, notwithstanding the good structural quality and composition of the films",
keywords = "IR-82498, METIS-290580",
author = "I.M. Dildar and D. Boltje and M.B.S. Hesselberth and Q. Xu and H.W. Zandbergen and Sybolt Harkema and J. Aarts",
note = "Conference ICSFS-16-International Conference on Solid Films and Surfaces, Genoa, Italy July, 1st - 6th 2012",
year = "2012",
doi = "10.1380/ejssnt.2012.619",
language = "English",
volume = "10",
pages = "619--623",
journal = "e-Journal of surface science and nanotechnology",
issn = "1348-0391",
publisher = "Surface Science Society of Japan",

}

Dildar, IM, Boltje, D, Hesselberth, MBS, Xu, Q, Zandbergen, HW, Harkema, S & Aarts, J 2012, 'Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition' e-Journal of surface science and nanotechnology, vol. 10, pp. 619-623. https://doi.org/10.1380/ejssnt.2012.619

Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition. / Dildar, I.M.; Boltje, D.; Hesselberth, M.B.S.; Xu, Q.; Zandbergen, H.W.; Harkema, Sybolt; Aarts, J.

In: e-Journal of surface science and nanotechnology, Vol. 10, 2012, p. 619-623.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Conductivity of LaAlO3/SrTiO3 Interfaces Made by Sputter Deposition

AU - Dildar, I.M.

AU - Boltje, D.

AU - Hesselberth, M.B.S.

AU - Xu, Q.

AU - Zandbergen, H.W.

AU - Harkema, Sybolt

AU - Aarts, J.

N1 - Conference ICSFS-16-International Conference on Solid Films and Surfaces, Genoa, Italy July, 1st - 6th 2012

PY - 2012

Y1 - 2012

N2 - There is much interest in interfaces between insulating oxides, such as SrTiO3 (STO) and LaAlO3 (LAO), where a two dimensional electron gas can form due to the so-called polar discontinuity. These interfaces are mostly fabricated by Pulsed Laser Deposition (PLD). We have investigated such interfaces by reactive RF sputtering in a high-pressure oxygen atmosphere. The films are smooth and crystalline. Transmission Electron Microscopy indicates that the interfaces are sharp and continuous while Electron Energy Loss Spectroscopy data indicate some slight intermixing. However, we find these interfaces to be non-conducting. It appears that the sputtered interface is not electronically reconstructed in the way reported for films grown by PLD, notwithstanding the good structural quality and composition of the films

AB - There is much interest in interfaces between insulating oxides, such as SrTiO3 (STO) and LaAlO3 (LAO), where a two dimensional electron gas can form due to the so-called polar discontinuity. These interfaces are mostly fabricated by Pulsed Laser Deposition (PLD). We have investigated such interfaces by reactive RF sputtering in a high-pressure oxygen atmosphere. The films are smooth and crystalline. Transmission Electron Microscopy indicates that the interfaces are sharp and continuous while Electron Energy Loss Spectroscopy data indicate some slight intermixing. However, we find these interfaces to be non-conducting. It appears that the sputtered interface is not electronically reconstructed in the way reported for films grown by PLD, notwithstanding the good structural quality and composition of the films

KW - IR-82498

KW - METIS-290580

U2 - 10.1380/ejssnt.2012.619

DO - 10.1380/ejssnt.2012.619

M3 - Article

VL - 10

SP - 619

EP - 623

JO - e-Journal of surface science and nanotechnology

JF - e-Journal of surface science and nanotechnology

SN - 1348-0391

ER -