Construction and Operation of a 165 K Microcooler with a Sorption Compressor and a Micromachined Cold Stage

J.F. Burger, H.J. Holland, H.J.M. ter Brake, M.C. Elwenspoek, H. Rogalla

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Physics & Astronomy