Continuous compliance compensation of position-dependent flexible structures

Nikolaos Kontaras, Marcel Heertjes, Heiko J. Zwart

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    112 Downloads (Pure)

    Abstract

    The implementation of lightweight high-performance motion systems in lithography and other applications imposes lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs increases the effect of structural flexibilities especially when the point of interest is not at a fixed location. This is for example occurring when exposing a silicon wafer. The present work addresses the problem of compliance compensation in flexible structures, when the performance location is time-varying. The compliance function is derived using the frequency domain representation of the solution of the partial differential equation (PDE) describing the structure. The method is validated by simulation results.
    Original languageUndefined
    Title of host publication12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016
    Place of PublicationAmsterdam
    PublisherElsevier
    Pages76-81
    Number of pages6
    ISBN (Print)2405-8963
    DOIs
    Publication statusPublished - 29 Jun 2016
    Event12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016 , Eindhoven: 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016 - Amsterdam
    Duration: 29 Jun 2016 → …

    Publication series

    NameIFAC-PapersOnLine
    PublisherElsevier
    Number13
    Volume49
    ISSN (Print)2405-8963

    Conference

    Conference12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing, ALCOSP 2016 , Eindhoven
    CityAmsterdam
    Period29/06/16 → …

    Keywords

    • feedforward
    • compliance compensation
    • EWI-27411
    • Euler-Bernoulli beam
    • IR-102262
    • PDE
    • Partial differential equation
    • METIS-319473
    • Flexible structures

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