Control of the crystallographic orientation of PZT thin films on silicon substrates by a single process step

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 4 Oct 2009
Event16th International Workshop on Oxide Electronics, iWOE 2009 - Tarragona, Spain
Duration: 4 Oct 20097 Oct 2009
Conference number: 16

Conference

Conference16th International Workshop on Oxide Electronics, iWOE 2009
Abbreviated titleiWOE
CountrySpain
CityTarragona
Period4/10/097/10/09

Keywords

  • METIS-260941

Cite this

Rijnders, A. J. H. M. (2009). Control of the crystallographic orientation of PZT thin films on silicon substrates by a single process step. -. Poster session presented at 16th International Workshop on Oxide Electronics, iWOE 2009, Tarragona, Spain.