Control of the crystallographic orientation of PZT thin films on silicon substrates by a single process step

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 4 Oct 2009
Event	16th International Workshop on Oxide Electronics, iWOE 2009 - Tarragona, Spain Duration: 4 Oct 2009 → 7 Oct 2009 Conference number: 16

Conference	16th International Workshop on Oxide Electronics, iWOE 2009
Abbreviated title	iWOE
Country/Territory	Spain
City	Tarragona
Period	4/10/09 → 7/10/09

Keywords

@conference{81f8492f6df040d6898b3bb4bd8a5680,

title = "Control of the crystallographic orientation of PZT thin films on silicon substrates by a single process step",

keywords = "METIS-260941",

author = "Rijnders, \{Augustinus J.H.M.\}",

year = "2009",

month = oct,

day = "4",

language = "Undefined",

pages = "--",

note = "16th International Workshop on Oxide Electronics, iWOE 2009 ; Conference date: 04-10-2009 Through 07-10-2009",

}