Control of the microstructure of Al metallization by graphoepitaxy
- M.J.C. van den Homberg*
- , P. F.A. Alkemade
- , J. L. Hurd
- , G. J. Leusink
- , S. Radelaar
*Corresponding author for this work
Research output: Contribution to journal › Conference article › Academic › peer-review
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