Abstract
We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand
Original language | English |
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Title of host publication | 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 |
Place of Publication | Los Alamitos, CA, USA |
Publisher | IEEE |
Pages | 538-541 |
Number of pages | 4 |
ISBN (Print) | 978-146736352-5 |
DOIs | |
Publication status | Published - 2013 |
Event | 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013 - Dushu Lake Hotel, Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013 Conference number: 8 |
Conference
Conference | 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013 |
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Abbreviated title | NEMS |
Country/Territory | China |
City | Suzhou |
Period | 7/04/13 → 10/04/13 |
Keywords
- EWI-23984
- METIS-300163
- IR-87926