Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

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    Abstract

    We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand
    Original languageEnglish
    Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages538-541
    Number of pages4
    ISBN (Print)978-146736352-5
    DOIs
    Publication statusPublished - 2013
    Event8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013 - Dushu Lake Hotel, Suzhou, China
    Duration: 7 Apr 201310 Apr 2013
    Conference number: 8

    Conference

    Conference8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013
    Abbreviated titleNEMS
    CountryChina
    CitySuzhou
    Period7/04/1310/04/13

    Keywords

    • EWI-23984
    • METIS-300163
    • IR-87926

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  • Cite this

    Legrain, A. B. H., Janson, T. G., Berenschot, J. W., Krijnen, G. J. M., Abelmann, L., & Tas, N. R. (2013). Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 538-541). Los Alamitos, CA, USA: IEEE. https://doi.org/10.1109/NEMS.2013.6559787