Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

A.B.H. Legrain; T.G. Janson; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Leon Abelmann; Niels Roelof Tas

doi:10.1109/NEMS.2013.6559787

Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

A.B.H. Legrain
, T.G. Janson
, Johan W. Berenschot
, Gijsbertus J.M. Krijnen
, Leon Abelmann
, Niels Roelof Tas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

15 Downloads (Pure)

Abstract

We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand

Original language	English
Title of host publication	8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Place of Publication	Los Alamitos, CA, USA
Publisher	IEEE
Pages	538-541
Number of pages	4
ISBN (Print)	978-146736352-5
DOIs	https://doi.org/10.1109/NEMS.2013.6559787
Publication status	Published - 2013
Event	8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013 - Dushu Lake Hotel, Suzhou, China Duration: 7 Apr 2013 → 10 Apr 2013 Conference number: 8

Conference

Conference	8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013
Abbreviated title	NEMS
Country/Territory	China
City	Suzhou
Period	7/04/13 → 10/04/13

Keywords

EWI-23984
METIS-300163
IR-87926

Access to Document

10.1109/NEMS.2013.6559787

Cite this

Legrain, A. B. H., Janson, T. G., Berenschot, J. W., Krijnen, G. J. M., Abelmann, L., & Tas, N. R. (2013). Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 538-541). IEEE. https://doi.org/10.1109/NEMS.2013.6559787

@inproceedings{66c0aeae013d47b382ea0abc6bd954e8,

title = "Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling",

abstract = "We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand",

keywords = "EWI-23984, METIS-300163, IR-87926",

author = "A.B.H. Legrain and T.G. Janson and Berenschot, \{Johan W.\} and Krijnen, \{Gijsbertus J.M.\} and Leon Abelmann and Tas, \{Niels Roelof\}",

note = "10.1109/NEMS.2013.6559787; 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, NEMS ; Conference date: 07-04-2013 Through 10-04-2013",

year = "2013",

doi = "10.1109/NEMS.2013.6559787",

language = "English",

isbn = "978-146736352-5",

pages = "538--541",

booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

publisher = "IEEE",

address = "United States",

}

Legrain, ABH, Janson, TG, Berenschot, JW , Krijnen, GJM, Abelmann, L & Tas, NR 2013, Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. IEEE, Los Alamitos, CA, USA, pp. 538-541, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, 7/04/13. https://doi.org/10.1109/NEMS.2013.6559787

Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. / Legrain, A.B.H.; Janson, T.G.; Berenschot, Johan W. et al.
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. Los Alamitos, CA, USA: IEEE, 2013. p. 538-541.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

AU - Legrain, A.B.H.

AU - Janson, T.G.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Abelmann, Leon

AU - Tas, Niels Roelof

N1 - Conference code: 8

PY - 2013

Y1 - 2013

N2 - We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand

AB - We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand

KW - EWI-23984

KW - METIS-300163

KW - IR-87926

U2 - 10.1109/NEMS.2013.6559787

DO - 10.1109/NEMS.2013.6559787

M3 - Conference contribution

SN - 978-146736352-5

SP - 538

EP - 541

BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

PB - IEEE

CY - Los Alamitos, CA, USA

T2 - 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013

Y2 - 7 April 2013 through 10 April 2013

ER -

Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this