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Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling
A.B.H. Legrain, T.G. Janson, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Leon Abelmann, Niels Roelof Tas
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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