Controlling interface chemistry in 6.x nm La/B multilayer optics

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 5 Oct 2015
Event2015 International Symposium on Extreme Ultraviolet Lithography - MECC Maastricht, Maastricht, Netherlands
Duration: 5 Oct 20157 Oct 2015
https://www.eiseverywhere.com/ehome/130233/296586/?&&internal=1

Conference

Conference2015 International Symposium on Extreme Ultraviolet Lithography
CountryNetherlands
CityMaastricht
Period5/10/157/10/15
Internet address

Keywords

  • METIS-311893

Cite this

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E., & Bijkerk, F. (2015). Controlling interface chemistry in 6.x nm La/B multilayer optics. -. Poster session presented at 2015 International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands.
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title = "Controlling interface chemistry in 6.x nm La/B multilayer optics",
keywords = "METIS-311893",
author = "Dmitry Kuznetsov and Sturm, {Jacobus Marinus} and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Andrey Yakshin and Eric Louis and Frederik Bijkerk",
year = "2015",
month = "10",
day = "5",
language = "English",
pages = "--",
note = "2015 International Symposium on Extreme Ultraviolet Lithography ; Conference date: 05-10-2015 Through 07-10-2015",
url = "https://www.eiseverywhere.com/ehome/130233/296586/?&&internal=1",

}

Kuznetsov, D, Sturm, JM, van de Kruijs, RWE, Yakshin, A, Louis, E & Bijkerk, F 2015, 'Controlling interface chemistry in 6.x nm La/B multilayer optics' 2015 International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands, 5/10/15 - 7/10/15, pp. -.

Controlling interface chemistry in 6.x nm La/B multilayer optics. / Kuznetsov, Dmitry; Sturm, Jacobus Marinus; van de Kruijs, Robbert Wilhelmus Elisabeth; Yakshin, Andrey; Louis, Eric; Bijkerk, Frederik.

2015. - Poster session presented at 2015 International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Controlling interface chemistry in 6.x nm La/B multilayer optics

AU - Kuznetsov, Dmitry

AU - Sturm, Jacobus Marinus

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Yakshin, Andrey

AU - Louis, Eric

AU - Bijkerk, Frederik

PY - 2015/10/5

Y1 - 2015/10/5

KW - METIS-311893

M3 - Poster

SP - -

ER -

Kuznetsov D, Sturm JM, van de Kruijs RWE, Yakshin A, Louis E, Bijkerk F. Controlling interface chemistry in 6.x nm La/B multilayer optics. 2015. Poster session presented at 2015 International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands.