Controlling interface chemistry in 6.x nm La/B multilayer optics

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 5 Oct 2015
Event2015 International Symposium on Extreme Ultraviolet Lithography - MECC Maastricht, Maastricht, Netherlands
Duration: 5 Oct 20157 Oct 2015
https://www.eiseverywhere.com/ehome/130233/296586/?&&internal=1

Conference

Conference2015 International Symposium on Extreme Ultraviolet Lithography
CountryNetherlands
CityMaastricht
Period5/10/157/10/15
Internet address

Keywords

  • METIS-311893

Cite this

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E., & Bijkerk, F. (2015). Controlling interface chemistry in 6.x nm La/B multilayer optics. -. Poster session presented at 2015 International Symposium on Extreme Ultraviolet Lithography, Maastricht, Netherlands.