Controlling Piezoelectric Responses in Pb(Zr0.52Ti0.48)O3 Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

Minh D. Nguyen; Evert P. Houwman; Huiyu Yuan; Benjamin Wylie- Van Eerd; Matthijn Dekkers; Gertjan Koster; Johan E. ten Elshof; Guus Rijnders

doi:10.1021/acsami.7b07428

Controlling Piezoelectric Responses in Pb(Zr_0.52Ti_0.48)O₃ Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

Minh D. Nguyen^*, Evert P. Houwman, Huiyu Yuan, Benjamin Wylie- Van Eerd, Matthijn Dekkers, Gertjan Koster, Johan E. ten Elshof, Guus Rijnders

^*Corresponding author for this work

Inorganic Materials Science

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Nanosheet Ca₂Nb₃O₁₀ (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir-Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr_0.52Ti_0.48)O₃ (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d_33f). An enhanced d_33f value of 356 pm V^-1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.

Original language	English
Pages (from-to)	35947-35957
Number of pages	11
Journal	ACS applied materials & interfaces
Volume	9
Issue number	41
DOIs	https://doi.org/10.1021/acsami.7b07428
Publication status	Published - 18 Oct 2017

Keywords

microstructure
nanosheets
piezoelectric films
ultrahigh piezoelectricity
ultralow expansion glass

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title = "Controlling Piezoelectric Responses in Pb(Zr0.52Ti0.48)O3 Films through Deposition Conditions and Nanosheet Buffer Layers on Glass",

abstract = "Nanosheet Ca2Nb3O10 (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir-Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr0.52Ti0.48)O3 (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d33f). An enhanced d33f value of 356 pm V-1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.",

keywords = "microstructure, nanosheets, piezoelectric films, ultrahigh piezoelectricity, ultralow expansion glass",

author = "Nguyen, {Minh D.} and Houwman, {Evert P.} and Huiyu Yuan and {Wylie- Van Eerd}, Benjamin and Matthijn Dekkers and Gertjan Koster and {ten Elshof}, {Johan E.} and Guus Rijnders",

year = "2017",

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doi = "10.1021/acsami.7b07428",

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publisher = "American Chemical Society",

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AU - Nguyen, Minh D.

AU - Houwman, Evert P.

AU - Yuan, Huiyu

AU - Wylie- Van Eerd, Benjamin

AU - Dekkers, Matthijn

AU - Koster, Gertjan

AU - ten Elshof, Johan E.

AU - Rijnders, Guus

PY - 2017/10/18

Y1 - 2017/10/18

N2 - Nanosheet Ca2Nb3O10 (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir-Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr0.52Ti0.48)O3 (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d33f). An enhanced d33f value of 356 pm V-1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.

AB - Nanosheet Ca2Nb3O10 (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir-Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr0.52Ti0.48)O3 (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d33f). An enhanced d33f value of 356 pm V-1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications.

KW - microstructure

KW - nanosheets

KW - piezoelectric films

KW - ultrahigh piezoelectricity

KW - ultralow expansion glass

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Controlling Piezoelectric Responses in Pb(Zr_0.52Ti_0.48)O₃ Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

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